Prof. Jiamin Shieh Profile

Prof. Jiamin Shieh

at Taiwan Semiconductor Research Institute

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Publications (2)

Proceedings Article | 3 October 2023 Presentation + Paper

Intelligent reticle modification enabled large-area metalens patterning

Chun-yen Chou, Hsueh-li Liu, Lin-chia Huang, Wilson Guo, Peichen Yu, You-chia Chang, Yao-wei Huang, Jia-min Shieh

Proceedings Volume 12653, 126530H (2023) https://doi.org/10.1117/12.2685760

KEYWORDS: Critical dimension metrology, Optical proximity correction, Optical lithography, Nanostructures, Metalenses, Silicon nitride, Reticles

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Proceedings Article | 3 October 2022 Poster

High-efficiency photolithographic NIR metalenses enabled by optical proximity correction with a neural-network lithographic model

Hsuehli Liu, Weiping Liao, Yuteng Chen, Shengsiang Su, Tongke Lin, Jiamin Shieh, Peichen Yu, Youchia Chang

Proceedings Volume PC12195, PC1219521 (2022) https://doi.org/10.1117/12.2644847

KEYWORDS: Optical proximity correction, Lithography, Optical lithography, Near infrared, Photoresist materials, Critical dimension metrology, Systems modeling, Semiconductors, Photoresist developing, Photomasks

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