Grating Light Modulator(GLM) based on MEMS is applied in projection display. In order to eliminate crosstalk of GLM
array, a monolithic integration device of GLM and active matrix is presented with post-CMOS process. The operating
principle of monolithic integration device is introduced. Active matrix unit is composed of a NMOS transistor and a
capacitor. The bottom electrode of GLM is connected to the electrode of the capacitor by via, so the voltage of GLM
equals to the voltage of capacitor. Every GLM unit is controlled by sole active matrix unit, so crosstalk can be eliminated,
which improves optical contrast and optical utilization ratio. And, the monolithic integration process of active matrix and
GLM is designed. Then the key indexes and parameters of active matrix which influences the performance of monolithic
integration device are analyzed in detail. It's indicated by analysis that storage capacitor and width-length ratio of
transistor influence the holding-voltage property and switch speed of monolithic integration device. Finally, with 0.18µm
process design kit(PDK) of SMIC and Cadence software, layout of monolithic integration device is designed. The
simulation results validate the correctness of the analyzed theory and the designed circuits. The monolithic integration
device designed can be applied in projection display which has 1920×1080 resolution, 30Hz frame frequency and 256
grayscales.
This paper proposes a novel Hadamard Transform near-infrared spectrometer based on MOEMS(Optical
micro-electro-mechanical system ) grating light modulator. A new method that grating light modulator combined with a
single near -infrared detector to detect spectrum is applied. The programmability of the grating light modulator linear
array is used to implement a Hadamard Transform encoding masks. Firstly, optics theory has been used to analyze the
essential principle of the spectrometer and the optical principle of grating light modulator. Then, It is theoretically
proved that the Hadamard Transform near-infrared spectrometer can reconstruct spectrum effectively and have a high
signal noise ratio. Finally, a new structure of the grating light modulator is given. Results of the software simulation
show that 5.5V maximum actuating voltage and 5 kHz response frequency are suitable for a miniature, portable,
cost-efficient spectrometer.
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