Process parameter optimization is important for improving the lapping effect of optical elements. Based on a temperature-controlled lapping disc, we present a method using fuzzy theory and orthogonal experiment to optimize lapping process parameters. Unlike the theory of optimization target set with a single evaluation criterion, a comprehensive optimization target with multiple evaluation criteria based on a fuzzy algorithm is proposed in this method. The lapping disc temperature, lapping disc rotation speed, and lapping pressure were selected as the optimization process parameters, and the material removal rate (MRR), surface change uniformity (SCU), and fuzzy synthetic index of lapping (FSILAP) were used as the optimization targets to conduct comparative experiments and analysis. The experimental results showed that when using the optimal process parameter combination obtained by the comprehensive index FSILAP as the optimization target, balanced results for MRR and SCU could be obtained. Notably, the result obtained when using a single evaluation criterion as the optimization target was suboptimal. The proposed method is effective and practical for the optimization of lapping process parameters.
Under the background of high precision machining requirements for planar optical elements, the overall structure design of four-axis special milling equipment was made, and the basic materials of equipment components were set. The precision distribution of the moving parts of the equipment is carried out for the traction of the plane optical element with high precision and high efficiency machining, so the equipment model is designed. The static simulation analysis was carried out in the two limit states of the equipment model, the basic design model and the optimal design model were compared. In the intermediate processing state, the deformation of the processing point and the driving part of the basic design model was optimized from 0.298 micron and 0.20 micron to 0.172 micron and 0.155 micron of the optimal design model respectively. The deformation of the processing point and the transmission part of the basic design model was optimized from 0.301 micron and 0.197 micron to 0.197 micron and 0.201 micron of the optimal design model, respectively.
Full aperture rapid planar polishing (RPP) equipment has been widely used in the field of optical processing, which requires high precision and stability of the polishing shaft. With high stability and sustainability of precision, the aerostatic bearing is the potential technology for RPP machine. To meet the needs of RPP machine, Fluent was used to analyze the load-bearing characteristics of high-precision aerostatic bearing. Based on the simulated results, the parameter optimization design for porous aerostatic bearing was conducted to get better load-bearing characteristics, including bearing capacity, static stiffness and gas consumption. The influence of air supply pressure, porous material thickness and film thickness on bearing characteristics were studied, and the simulation analysis was performed to get the optimal design parameters for aerostatic bearing. The simulated results show that the designed high-precision aerostatic bearing can satisfy the requirements of RPP machine.
With the development of the modern state of optical engineering, large diameter (400×400 mm) of optical element processing and its whole surface shape accuracy is 0.1 micron (λ/ 6). It's on special crystal material single point diamond fly knife cutting ultra-precision machine tools put forward higher request, the bed is equipped with stable, the lathe bed equipment for the foundation design, and set the parts of the material. We think about the precision analysis of the external influencing factors of equipment, and design the model of equipment bed. In the bed model, the static simulation analysis is made under the two schemes of basic design and optimized reinforcement, respectively. And we compared the necessary design model and optimized design model. The total deformation was 0.409 microns for bed base, 0.268 microns for oblique rib, and 0.312 microns for circular rib. And we analyzed the deformation in X, Y and Z directions.
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