Prof. Jörg Baumgart Profile

Prof. Jörg Baumgart

Professor at Hochschule Ravensburg-Weingarten

SPIE Involvement:

Author

Publications (5)

Proceedings Article | 4 March 2013 Paper

LED color mixing with diffractive structures

Theresa Bonenberger, Jörg Baumgart, Simon Wendel, Cornelius Neumann

Proceedings Volume 8641, 864107 (2013) https://doi.org/10.1117/12.2003964

KEYWORDS: Light emitting diodes, Diffraction gratings, Diffraction, Color difference, Sensors, Light sources and illumination, Light sources, LED lighting, Ray tracing, Optical design

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SPIE Journal Paper | 1 May 1998

Scatterometry of honed surfaces

Jorg Baumgart, Horst Truckenbrodt

OE, Vol. 37, Issue 05, (May 1998) https://doi.org/10.1117/12.10.1117/1.601659

KEYWORDS: Light scattering, Scatterometry, Scattering, Surface finishing, Process control, Anisotropy, Diffraction, Manufacturing, Optical testing, Inspection

Proceedings Article | 17 September 1997 Paper

Three-dimensional analysis of machined surfaces by scatterometry

Jorg Baumgart, Horst Truckenbrodt

Proceedings Volume 3098, (1997) https://doi.org/10.1117/12.281151

KEYWORDS: Light scattering, Surface finishing, Scattering, Scatterometry, Process control, Polishing, Manufacturing, Sensors, Databases, Inspection

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Proceedings Article | 19 August 1996 Paper

Light-scattering-based micrometrology

Joerg Bischoff, Jorg Baumgart, Joachim Bauer, Horst Truckenbrodt

Proceedings Volume 2775, (1996) https://doi.org/10.1117/12.246752

KEYWORDS: Scatterometry, Silicon, Diffraction, Light scattering, Calibration, Metrology, Data analysis, Scatter measurement, Data modeling, Interfaces

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Proceedings Article | 21 May 1996 Paper

Photoresist metrology based on light scattering

Joerg Bischoff, Jorg Baumgart, Horst Truckenbrodt, Joachim Bauer

Proceedings Volume 2725, (1996) https://doi.org/10.1117/12.240118

KEYWORDS: Calibration, Diffraction, Metrology, Light scattering, Data analysis, Statistical modeling, Error analysis, Semiconducting wafers, Silicon, Data modeling

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