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Jun Gao
Software Engineer at HP Inc
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Publications (1)
Proceedings Article | 24 March 2006 Paper
nDSE-based overlay alignment: enabling technology for nanometrology and fabrication
Jun Gao, Carl Picciotto, Wei Wu, Inkyu Park, William Tong
Proceedings Volume 6152, 615223 (2006) https://doi.org/10.1117/12.656610
KEYWORDS: Optical alignment, Detection and tracking algorithms, Algorithm development, Semiconducting wafers, Algorithms, Overlay metrology, Image processing, Error analysis, Fourier transforms, Sensing systems
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