KEYWORDS: Film thickness, Thin films, Scanning electron microscopy, Ellipsometry, Electron microscopes, Nanofilms, Reflection, Systems modeling, Dispersion, Mathematical modeling
In this paper, ellipsometer combined with scanning electron microscope for solving the complex refractive index of nano film is proposed. Firstly, the interface of the nano film was measured using scanning electron microscope to obtain its thickness. Next, measure the parameters of the ellipsometer to establish the corresponding mathematical model and obtain the characteristic parameters of the thin film. Then, optimize the ellipsoidal mathematical model by comparing the film thickness obtained by scanning electron microscopy with that obtained by ellipsometry. Ultimately obtaining accurate film thickness and optical constants. The results show that the relative error of the calculation result of the optical properties is less than 1.0 nm and the measured values of optical constants are also consistent with the theoretical values. At the same time, the results derived from our method are in better agreement with the standard value, which shows that the measurement results are true and effective. Therefore, this method reveals the possibility of high-precision measurement of nano film through ellipsometer and scanning electron microscope, and makes it be a much better option to be employed for further micro-nano structures analysis applications.
A nanoscale high reference material is a physical reference material with a specific value, mainly used for the transfer and calibration of relevant nanometric instruments. this paper develops a probe scanning atomic force microscopes (AFM) system for step height topography characterization. Firstly, the step standard template is proposed, and the computation time is reduced by iterative approach. Second, the principle of AFM and the roughness measurement method are investigated. Finally, the same step height is compared and measured using AFM. The results show that the maximum standard deviation of the AFM is around 0.015.
In this paper, an automated edge detection model is developed for large irregular circular using a laser scanning approach. Some key influencing factors, just like surface quality, surface orientation and scan depth, have been respectively considered in this model. By consider of the limited of field of view and corresponding optical constraints, only a small part of key region is effectively captured by laser scanner at a specific posture. In term of specified view angles of laser scanner, the position of laser scanner approximate to the stand-off distance with respect to edge area can be determined and then high-quality point clouds of large irregular circular edge feature can be effectively obtained. Finally, a series of experiments are performed on workpieces with different large irregular circular features. The experimental result shows our method features high automation and high efficiency. Those results are most promising for on-machine applications in dimensional measurement of large-scale workpiece.
This article presents a novel automated measurement prototype for 3D geometry of mobile and large-scale conical workpiece, manipulated through two independent robot platforms that placed on its two sides with laser scanner and motorized linear stage. First, with point cloud that covers end point provided by laser scanner. Then, modeling and identification of end point of workpiece is established based on height variations in its nearest neighborhood with respect to virtual measurement datum plane, which is step-by-step derivatively generated according to initial datum point in an online virtual inspection environment. Next, the current geometry-relations between neighboring end points can be subsequently used to guide the laser scanner for high precision sampling surface area incorporating an automatic simple module. Moreover, both orientation and position geometrical relationships of the corresponding features on the fitting circles are analyzed too. Details preliminary experimental tests were performed to verify the measuring accuracy of this method.
Nowadays, in industrial area, many mechanical part manufactures are applying 3D optical scanner in their production shop to do part online inspection, or in their coordinate measurement laboratory to obtain crucial part dimensions. The high demands of the 3D optical scanner make it necessary for researchers to create convenient and stable device for calibrating this kind of contact-less measurement instrument. In a former study, we introduced a plate with standard spheres as a calibration device, which showed a good test result when applied on a 3D optical scanner. However, we decide to do more research on related area. The first purpose of this paper is to present an improved calibration device based on our former study and daily work experience. The new device has a wider test range with less spheres, and it’s structure is more portable, stable and more convenient to provide spatial positions. Results showed that the new device performed well in data stability and is quite easy to practice. The second purpose of this work is to study related influence factors on the 3D optical scanner calibration process. We investigated factors such as temperature, points cloud density, reflection patch density and numbers of images stitching. The results showed that those factors should be limited in proper conditions to ensure an acceptable calibration of 3D optical scanner.
A calibration device for the optical scanner is presented in this paper for the situation that lacking of a convenient calibration method for the optical scanner in domestic industry practice. The device utilized the spherical center distance of fixed balls as standard dimensions. It can provide various dimensions in different orientations and magnitudes since it has nine fixed standard balls in different positions. When we run an actual measurement process on this device with an optical scanner, the indication error of the scanner can be obtained conveniently. The device is simple in structure and easy to operate, it can produce multiple dates in one single measurement process simultaneously, which can evaluate the performance of the optical scanner comprehensively.
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