Experiments showed that high density point and linear bulges emerged on the surface of fused silica after thermal annealing in an oven. To analyze the source of annealing bulges , the surface morphology was studied by atomic force microscopy, and the depth profile of impurities were analyzed by secondary ion mass spectroscopy. The results showed that impurities in redeposition layer migrated from subsurface to surface during annealing. The potential of using thermal annealing to reveal surface structure was developed.
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