Mr. Jung Hoon Oh Profile

Jung Hoon Oh

at Kumho Petrochemical Co., Ltd.

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 4 December 2008 Paper

Jung Hoon Oh, Dong Chul Seo, Hyun Sang Joo, Sung Do Jung, Jin Ho Kim, Seung Jae Lee, Ran Ra Park, JoonHee Han, Joo Hyeon Park

Proceedings Volume 7140, 714031 (2008) https://doi.org/10.1117/12.804631

KEYWORDS: Polymers, Polymerization, Lithography, Diffusion, Extreme ultraviolet, Glasses, Photoresist materials, Sodium, Line edge roughness, Etching

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Keywords/Phrases