Organic thin-film transistors (TFTs) using the pentacene as an active electronic material have shown the mobility of 0.8 cm2Vs and the grains larger than 1 micrometers . Deep level transient spectroscopy (DLTS) measurements have been carried out on metal/insulator/organic-semiconductor (MIS) structure devices that have a depletion region at the insulator/organic-semiconductor interface. The very long capacitance transients were measured by the trapping of electronic charge carriers distributed in energy. Based on the DLTS characteristics, the energy levels of hole and electron traps in the obtained pentacene films were approximately Ev+0.24eV, Ev+0.31eV, and Ec- 0.69eV.
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