Mr. Karim Tamssaouet Profile

Karim Tamssaouet

at BI Norwegian Business School

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Publications (1)

Proceedings Article | 18 September 2024 Paper

Mask management in optimized photolithography scheduling of a high-mix semiconductor manufacturing facility

Renaud Roussel, Camille Babin, Abdel Bitar, Sebastian Knopp, Stéphane Dauzère-Pérès, Karim Tamssaouet

Proceedings Volume 13273, 132730D (2024) https://doi.org/10.1117/12.3029925

KEYWORDS: Transportation, Semiconductor manufacturing, Diffusion, Source mask optimization, Reticles, Process modeling, Modeling, Inspection, Mathematical optimization, Lithography, Mask cleaning

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