Ms. Kathy L. Hanson Profile

Kathy L. Hanson

Product Manager at ATMI Inc

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Publications (1)

Proceedings Article | 2 July 2003 Paper

Improving IC process efficiency with critical materials management

Kathy Hanson, Robert Andrews

Proceedings Volume 5043, (2003) https://doi.org/10.1117/12.485278

KEYWORDS: Semiconducting wafers, Industrial chemicals, Chemical analysis, Deep ultraviolet, Semiconductors, Chemistry, Manufacturing, Data modeling, Photoresist processing, Systems modeling

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