Dr. Kay Gastinger Profile

Dr. Kay Gastinger

Division Director at Norwegian Univ of Science and Technology

SPIE Involvement:

Author

Proceedings Article | 3 November 2011 Paper

Parallel approach to MEMS and micro-optics interferometric testing

M. Kujawińska, S. Beer, K. Gastinger, C. Gorecki, K. Haugholt, M. Józwik, P. Lambelet, R. Paris, A. Styk, U. Zeitner

Proceedings Volume 8011, 80117O (2011) https://doi.org/10.1117/12.903256

KEYWORDS: Semiconducting wafers, Interferometers, Inspection, Diffractive optical elements, Wafer-level optics, Imaging systems, Interferometry, Lithium, Microelectromechanical systems, Micro optics

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Proceedings Article | 27 May 2011 Paper

Inspection of processes during silicon wafer sawing using low coherence interferometry in the near infrared wavelength region

Kay Gastinger, Lars Johnsen, Ove Simonsen, Astrid Aksnes

Proceedings Volume 8082, 80820U (2011) https://doi.org/10.1117/12.889498

KEYWORDS: Silicon, Spatial resolution, Silicon carbide, Solids, Interferometry, Interferometers, Semiconducting wafers, Near infrared, Image resolution, Inspection

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Proceedings Article | 14 September 2010 Paper

Near-infrared low-coherence speckle interferometry (NIR-LCSI) as a tool for the investigation of silicon in solar cell production

Kay Gastinger, Lars Johnsen

Proceedings Volume 7387, 738713 (2010) https://doi.org/10.1117/12.871609

KEYWORDS: Silicon, Spatial resolution, Imaging systems, Surface finishing, Near infrared, Speckle, Silicon carbide, Optical coherence tomography, Interferometers, Semiconducting wafers

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Proceedings Article | 14 September 2010 Paper

Smart pixel camera based signal processing in an interferometric test station for massive parallel inspection of MEMS and MOEMS

Adam Styk, Patrick Lambelet, Arne Røyset, Małgorzata Kujawińska, Kay Gastinger

Proceedings Volume 7387, 73870M (2010) https://doi.org/10.1117/12.871522

KEYWORDS: Cameras, Demodulation, Interferometers, Interferometry, Imaging systems, Inspection, Signal detection, Signal processing, Data processing, Modulation

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Proceedings Article | 2 August 2010 Paper

Design, technology, and signal processing for DOE-based microinterferometer array applied in new generation M(O)EMS test equipment

M. Kujawinska, M. Józwik, A. Styk, U. Zeitner, A. Røyset, S. Beer, R. Moosburger, C. Gorecki, K. Gastinger

Proceedings Volume 7791, 779103 (2010) https://doi.org/10.1117/12.862170

KEYWORDS: Interferometers, Semiconducting wafers, Cameras, Lithium, Imaging systems, Inspection, Diffraction gratings, Demodulation, Signal processing, Wafer-level optics

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Proceedings Article | 14 May 2010 Paper

Next-generation test equipment for micro-production

Kay Gastinger, Lars Johnsen, Malgorzata Kujawinska, Michal Jozwik, Uwe Zeitner, Peter Dannberg, Jorge Albero, Sylwester Bargiel, Christoph Schaeffel, Stephan Beer, Rudolf Moosburger, Patrick Lambelet, Marco Pizzi

Proceedings Volume 7718, 77180F (2010) https://doi.org/10.1117/12.855087

KEYWORDS: Semiconducting wafers, Interferometers, Inspection, Imaging systems, Cameras, Mirrors, Lithium, Glasses, Wafer-level optics, Diffraction gratings

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Proceedings Article | 14 May 2010 Paper

Integrated glass lenses fabrication for parallel interferometric inspection systems of MEMS and MOEMS

Jorge Albero, Sylwester Bargiel, Christophe Gorecki, Kay Gastinger

Proceedings Volume 7716, 771621 (2010) https://doi.org/10.1117/12.853907

KEYWORDS: Silicon, Glasses, Etching, Microlens, Inspection, Semiconducting wafers, Interferometers, Interferometry, Anisotropic etching, Spherical lenses

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Proceedings Article | 17 June 2009 Paper

Optical, mechanical, and electro-optical design of an interferometric test station for massive parallel inspection of MEMS and MOEMS

Kay Gastinger, Karl Henrik Haugholt, Malgorzata Kujawinska, Michal Jozwik, Christoph Schaeffel, Stephan Beer

Proceedings Volume 7389, 73891J (2009) https://doi.org/10.1117/12.828162

KEYWORDS: Semiconducting wafers, Interferometers, Inspection, Cameras, Imaging systems, Beam splitters, Glasses, Signal detection, Mirrors, Interferometry

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Proceedings Article | 25 April 2008 Paper

Numerical simulations of interferometrical deformation measurements in multi-layered objects

Kay Gastinger, Pål Løvhaugen, Ola Hunderi

Proceedings Volume 6995, 69950H (2008) https://doi.org/10.1117/12.784444

KEYWORDS: Glasses, Interfaces, Sensors, Ray tracing, Interferometry, Microelectromechanical systems, Phase measurement, Geometrical optics, Silicon, Cameras

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Proceedings Article | 22 April 2008 Paper

Low coherence speckle interferometry (LCSI): when speckle interferometry goes sub-surface

Kay Gastinger

Proceedings Volume 7008, 70081I (2008) https://doi.org/10.1117/12.797354

KEYWORDS: Interfaces, Adhesives, Aluminum, Phase measurement, Speckle interferometry, Coherence (optics), Optical coherence tomography, Refractive index, Cameras, Polymers

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Proceedings Article | 18 June 2007 Paper

Multi-technique platform for dynamic and static MEMS characterisation

Kay Gastinger, Pål Løvhaugen, Øystein Skotheim, Ola Hunderi

Proceedings Volume 6616, 66163K (2007) https://doi.org/10.1117/12.726307

KEYWORDS: Interfaces, Sensors, Glasses, Microelectromechanical systems, Interferometry, Digital holography, Semiconducting wafers, Speckle, Cameras, Lithium

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Proceedings Article | 15 September 2006 Paper

Investigations of phase changes in semitransparent media using low coherence speckle interferometry (LCSI)

Kay Gastinger, Klaus Hinsch, Svein Winther

Proceedings Volume 6341, 63410S (2006) https://doi.org/10.1117/12.695300

KEYWORDS: Adhesives, Interfaces, Phase measurement, Systems modeling, Refractive index, Aluminum, Reflection, Glasses, Mirrors, Modeling

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Proceedings Article | 27 August 2005 Paper

Optimisation of low-coherence speckle interferometry (LCSI) for characterisation of multi-layered materials

Kay Gastinger, Svein Winther

Proceedings Volume 5858, 58580K (2005) https://doi.org/10.1117/12.613170

KEYWORDS: Interfaces, Cameras, Speckle pattern, Signal to noise ratio, Coherence (optics), Signal attenuation, Optical coherence tomography, Charge-coupled devices, Speckle interferometry, Interferometry

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Proceedings Article | 30 November 2004 Paper

Determination of the phase- and polarization-changing properties of reflective spatial light modulators in one set-up

Frantz Stabo-Eeg, Kay Gastinger, Ola Hunderi, Mikael Lindgren

Proceedings Volume 5618, (2004) https://doi.org/10.1117/12.578438

KEYWORDS: Polarization, Spatial light modulators, Liquid crystals, Polysomnography, Reflectivity, Beam splitters, Optical components, Polarizers, Phase shifts, Phase measurement

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Proceedings Article | 2 August 2004 Paper

Low-coherence speckle interferometry (LCSI) for detection of interfacial instabilities in adhesive-bonded joints

Kay Gastinger, Gerd Guelker, Klaus Hinsch, Hans Pedersen, Trude Storen, Svein Winther

Proceedings Volume 5532, (2004) https://doi.org/10.1117/12.561204

KEYWORDS: Adhesives, Interfaces, Refractive index, Aluminum, Coherence (optics), Interferometers, Cameras, Signal detection, Glasses, Interferometry

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Proceedings Article | 27 May 2003 Paper

Low-coherence speckle interferometer (LCSI) for characterisation of adhesion in adhesive-bonded joints

Kay Gastinger, Svein Winther, Klaus Hinsch

Proceedings Volume 4933, (2003) https://doi.org/10.1117/12.516577

KEYWORDS: Adhesives, Glasses, Interfaces, Aluminum, Interferometers, Speckle, Charge-coupled devices, Optical components, Spherical lenses, Finite element methods

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