Dr. Kefeng Zhang Profile

Dr. Kefeng Zhang

at Shanghai Institute of Technical Physics

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Author

Publications (10)

Proceedings Article | 20 November 2014 Paper

Study of ICP-RIE etching on CdZnTe substrate

Pengxiao Xu, Hui Qiao, Ren Wang, Tianyi Lan, Shijia Liu, Nili Wang, Qin Zhou, Bin Xu, Xiujuan Liu, Yidan Lu, Li-wei Wang, Chao Chang, Kefeng Zhang, Xiangyang Li

Proceedings Volume 9300, 93000T (2014) https://doi.org/10.1117/12.2071045

KEYWORDS: Etching, Photoresist materials, Argon, Plasma, Gases, Optical microscopes, Lithography, Reactive ion etching, Mercury cadmium telluride, Infrared detectors

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Proceedings Article | 11 September 2013 Paper

Properties study of ZnS thin films deposited on HgCdTe substrate by different methods

Pengxiao Xu, Guoqing Xu, Kaihui Chu, Nili Wang, Qing Zhou, Yidan Tang, Kefeng Zhang, Xiangyang Li

Proceedings Volume 8907, 890742 (2013) https://doi.org/10.1117/12.2034530

KEYWORDS: Zinc, Thin films, Mercury cadmium telluride, Infrared radiation, Sputter deposition, Thin film deposition, Thin film devices, Transmittance, X-rays, Thermography

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Proceedings Article | 15 October 2012 Paper

Mobility spectrum analysis of ion-etching-induced p-to-n type converted layers in HgCdTe single crystal

Guoqing Xu, Xiangyang Liu, Kefeng Zhang, Hui Qiao, Jia Jia, Xiangyang Li

Proceedings Volume 8419, 841912 (2012) https://doi.org/10.1117/12.975806

KEYWORDS: Mercury, Etching, Mercury cadmium telluride, Ions, Chemical species, Spectrum analysis, Temperature metrology, Crystals, Wet etching, Crystallography

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Proceedings Article | 15 October 2012 Paper

Terahertz time-domain spectroscopy of Cd1-xZnxTe single crystal

Reng Wang, Xingcao Lin, Liping Zhang, Kefeng Zhang, Cuiling Jiao, Ye Lu, Xiangyang Li, Jin Ge, Shuhong Hu, Ning Dai

Proceedings Volume 8419, 84190L (2012) https://doi.org/10.1117/12.952479

KEYWORDS: Terahertz radiation, Crystals, Dielectrics, Absorption, Refractive index, Terahertz spectroscopy, Spectroscopy, Zinc, Phonons, Sensors

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Proceedings Article | 18 November 2008 Paper

Inductively coupled plasma etching of In1-x-yAlxGayAs in BCl3/Cl2/Ar

Jinhua Ning, Kefeng Zhang, Hengjing Tang, Yang Wang, Xue Li, Hai-mei Gong

Proceedings Volume 7135, 71353I (2008) https://doi.org/10.1117/12.803196

KEYWORDS: Etching, Chlorine, Plasma etching, Plasma, Ions, Indium gallium arsenide, Anisotropic etching, Reactive ion etching, Argon, Scanning electron microscopy

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Proceedings Article | 4 March 2008 Paper

Improved Au/Zn/Au ohmic contacts for p-type InP

Kefeng Zhang, Hengjing Tang, Xiaoli Wu, Jintong Xu, Xue Li, Haimei Gong

Proceedings Volume 6621, 662118 (2008) https://doi.org/10.1117/12.790778

KEYWORDS: Silicon, Resistance, Photodiodes, Gallium, Gold, Annealing, Zinc, Antireflective coatings, Indium, Metals

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Proceedings Article | 3 March 2008 Paper

Recombination lifetime characterization and mapping of p-i-n InP/Ln0.53Ga0.47As/InP mesa structure using the microwave photoconductivity decay (u-PCD) technique

Xiaoli Wu, Kefeng Zhang, Yimin Huang, Hengjing Tang, Bing Han, Xue Li, Haimei Gong

Proceedings Volume 6621, 66211C (2008) https://doi.org/10.1117/12.790832

KEYWORDS: Ions, Microwave radiation, Gallium, Etching, Semiconducting wafers, Heterojunctions, Argon, Semiconductors, Fabrication, Infrared detectors

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Proceedings Article | 8 January 2008 Paper

High uniformity InGaAs linear mesa-type SWIR focal plane arrays

Hengjing Tang, Xiaoli Wu, Kefeng Zhang, Liping Ye, Nili Wang, Xue Li, Haimei Gong

Proceedings Volume 6835, 683516 (2008) https://doi.org/10.1117/12.753653

KEYWORDS: Indium gallium arsenide, Sensors, Staring arrays, Diodes, Detector arrays, Signal detection, Readout integrated circuits, Short wave infrared radiation, Capacitance, Interference (communication)

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Proceedings Article | 8 January 2008 Paper

Performance analysis of 256 element linear 2.4µm InGaAs photovoltaic detector arrays

Kefeng Zhang, Hengjing Tang, Xiaoli Wu, Xue Li, Yonggang Zhang, Haimei Gong

Proceedings Volume 6835, 683506 (2008) https://doi.org/10.1117/12.755774

KEYWORDS: Indium gallium arsenide, Sensors, Detector arrays, Resistance, Semiconducting wafers, Photovoltaic detectors, Photodiodes, Quantum efficiency, Diodes, Indium

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Proceedings Article | 8 January 2008 Paper

Properties of Au/Pt/Ti contact to p-InP by rapid thermal processing

Yanqiu Lv, Hengjing Tang, Bing Han, Xiaoli Wu, Kefeng Zhang, Xue Li, Haimei Gong

Proceedings Volume 6835, 68350D (2008) https://doi.org/10.1117/12.756554

KEYWORDS: Resistance, Annealing, Doping, Gold, Platinum, Chemical elements, Interfaces, Reliability, Metalorganic chemical vapor deposition, Electrodes

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Showing 5 of 10 publications

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