Dr. Khalil Najafi Profile

Dr. Khalil Najafi

at Univ of Michigan

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Author

Publications (10)

Proceedings Article | 3 May 2012 Paper

Hair-based sensors for micro-autonomous systems

Mahdi Sadeghi, Rebecca Peterson, Khalil Najafi

Proceedings Volume 8373, 83731L (2012) https://doi.org/10.1117/12.919860

KEYWORDS: Sensors, Silicon, Microelectromechanical systems, Capacitance, Liquids, Resistance, Biomimetics, Microfluidics, Actuators, Situational awareness sensors

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Proceedings Article | 18 April 2011 Paper

Energy harvesting of radio frequency and vibration energy to enable wireless sensor monitoring of civil infrastructure

Tzeno Galchev, James McCullagh, Rebecca Peterson, Khalil Najafi, Amir Mortazawi

Proceedings Volume 7983, 798314 (2011) https://doi.org/10.1117/12.880174

KEYWORDS: Bridges, Antennas, Sensors, Capacitors, Amplitude modulation, Energy harvesting, Magnesium, Electronics, Light emitting diodes, Copper

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Proceedings Article | 9 April 2010 Paper

A two-tiered self-powered wireless monitoring system architecture for bridge health management

Masahiro Kurata, Jerome Lynch, Tzeno Galchev, Michael Flynn, Patrick Hipley, Vince Jacob, Gwendolyn van der Linden, Amir Mortazawi, Khalil Najafi, Rebecca Peterson, Li-Hong Sheng, Dennis Sylvester, Edward Thometz

Proceedings Volume 7649, 76490K (2010) https://doi.org/10.1117/12.848212

KEYWORDS: Sensors, Bridges, Wireless communications, Data communications, Telecommunications, Structural health monitoring, Amplitude modulation, Inspection, Data processing, Prototyping

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Proceedings Article | 5 February 2010 Paper

Wafer-level vacuum/hermetic packaging technologies for MEMS

Sang-Hyun Lee, Jay Mitchell, Warren Welch, Sangwoo Lee, Khalil Najafi

Proceedings Volume 7592, 759205 (2010) https://doi.org/10.1117/12.843831

KEYWORDS: Packaging, Microelectromechanical systems, Semiconducting wafers, Wafer bonding, Glasses, Gyroscopes, Neodymium, Silicon, Metals, Gold

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Proceedings Article | 8 April 2009 Paper

Overview of a cyber-enabled wireless monitoring system for the protection and management of critical infrastructure systems

Jerome Lynch, Vineet Kamat, Victor Li, Michael Flynn, Dennis Sylvester, Khalil Najafi, Timothy Gordon, Michael Lepech, Abbas Emami-Naeini, Alex Krimotat, Mohammed Ettouney, Sharada Alampalli, Tayfun Ozdemir

Proceedings Volume 7294, 72940L (2009) https://doi.org/10.1117/12.821874

KEYWORDS: Sensors, Bridges, Inspection, Data modeling, Data processing, Finite element methods, Structural health monitoring, Antennas, Internet, Sensing systems

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Proceedings Article | 15 January 2003 Paper

Micropackaging technologies for integrated microsystems: applications to MEMS and MOEMS

Khalil Najafi

Proceedings Volume 4979, (2003) https://doi.org/10.1117/12.484953

KEYWORDS: Semiconducting wafers, Silicon, Packaging, Microelectromechanical systems, Glasses, Wafer bonding, Microsystems, Thin films, Silicon films, Microopto electromechanical systems

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Proceedings Article | 21 November 2001 Paper

Submicron high-aspect-ratio silicon beam etch

Gary O'Brien, David Monk, Khalil Najafi

Proceedings Volume 4592, (2001) https://doi.org/10.1117/12.448983

KEYWORDS: Etching, Silicon, Statistical modeling, Reactive ion etching, Fluorine, Diffractive optical elements, Ions, Chemistry, Semiconducting wafers, Oxides

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Proceedings Article | 23 September 1996 Paper

Silicon micromachining technologies: future needs and challenges

Khalil Najafi

Proceedings Volume 2879, (1996) https://doi.org/10.1117/12.251208

KEYWORDS: Silicon, Micromachining, Sensors, Electronics, Semiconducting wafers, Actuators, Microelectromechanical systems, Integrated circuits, Etching, Scanning electron microscopy

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Proceedings Article | 21 October 1994 Paper

Bulk silicon micromachining for the scanning thermal profiler and other applications

Yogesh Gianchandani, Khalil Najafi

Proceedings Volume 2291, (1994) https://doi.org/10.1117/12.190930

KEYWORDS: Silicon, Semiconducting wafers, Glasses, Metals, Etching, Reactive ion etching, Oxides, Boron, Dielectrics, Micromachining

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Proceedings Article | 2 March 1993 Paper

Silicon integrated microsensors

Khalil Najafi

Proceedings Volume 1793, (1993) https://doi.org/10.1117/12.141220

KEYWORDS: Silicon, Sensors, Semiconducting wafers, Microsensors, Thermography, Integrated circuits, Etching, Micromachining, Silicon films, Integrated optics

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Showing 5 of 10 publications

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