Mr. Kotaro Niimi Profile

Kotaro Niimi

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Publications (3)

Proceedings Article | 10 April 2024 Poster + Paper

SEM imaging of high aspect ratio trench by selectively controlling the electron beam irradiation using photocathode

Yuta Arakawa, Kotaro Niimi, Yohei Otsuka, Daiki Sato, Atsushi Koizumi, Haruka Shikano, Hokuto Iijima, Tomohiro Nishitani, Yoshio Honda, Hiroshi Amano

Proceedings Volume 12955, 1295534 (2024) https://doi.org/10.1117/12.3010733

KEYWORDS: Scanning electron microscopy, Electron beams, Feedback control, Signal detection, Semiconductors, Metrology, Scanning

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Proceedings Article | 10 April 2024 Poster + Paper

Photoelectron beam from semiconductor photocathodes leading to new inspection technologies

T. Nishitani, Y. Arakawa, K. Niimi, Y. Otsuka, D. Sato, A. Koizumi, H. Shikano, H. Iijima, Y. Honda, H. Amano

Proceedings Volume 12955, 1295533 (2024) https://doi.org/10.1117/12.3010730

KEYWORDS: Electron beams, Semiconductors, Scanning electron microscopy, Transmission electron microscopy, Laser irradiation, Semiconductor materials, Group III-V semiconductors, Electron microscopes, Vacuum

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Proceedings Article | 10 April 2024 Poster + Paper

Local voltage contrast changes in MOSFET using scanning electron microscopy with photoelectron beam technology

Daiki Sato, Yuta Arakawa, Kotaro Niimi, Keika Fukuroi, Yutaro Tajiri, Atsushi Koizumi, Haruka Shikano, Hokuto Iijima, Tomohiro Nishitani, Yoshio Honda, Hiroshi Amano

Proceedings Volume 12955, 1295529 (2024) https://doi.org/10.1117/12.3009947

KEYWORDS: Scanning electron microscopy, Electron beams, Field effect transistors, Transistors, Metrology, Inspection, Electrical conductivity

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