Dr. KwangEun Kim Profile

Dr. KwangEun Kim

at SAMSUNG Electronics Co., Ltd.

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 26 May 2022 Poster + Presentation + Paper

Depth measurement using high-voltage SEM that changes the inclination of the incident beam

JaeHyung Ahn, KwangEun Kim, Souk Kim, Younghoon Sohn

Proceedings Volume 12053, 1205324 (2022) https://doi.org/10.1117/12.2614186

KEYWORDS: Scanning electron microscopy, Tungsten, Electron microscopy, Etching, 3D metrology, Manufacturing, Error analysis

Read Abstract +

Proceedings Article | 26 May 2022 Presentation + Paper

A study on the detection and monitoring of weak areas in wafer using massive 2D and 3D measurement data

Sungyoon Ryu, Dong Hoon Kim, Sunhong Jun, Suho Ryu, JaeHyung Ahn, Hyun Lee, Kwang-Eun Kim, Yusin Yang, Younghoon Sohn

Proceedings Volume 12053, 1205302 (2022) https://doi.org/10.1117/12.2613631

KEYWORDS: Semiconducting wafers, 3D metrology, Inspection, Metrology, Ellipsometry, 3D modeling, Detection and tracking algorithms, Wafer-level optics, Semiconductors, Manufacturing

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years