CIS221-X is a prototype complementary metal-oxide-semiconductor (CMOS) image sensor, optimized for soft x-ray astronomy and developed for the proposed ESA Transient High Energy Sky and Early Universe Surveyor (THESEUS) mission. The sensor features 40 μm pitch square pixels built on a 35 μm thick, high-resistivity epitaxial silicon that is fully depleted by reverse substrate bias. Backside illumination processing has been used to achieve high x-ray quantum efficiency, and an optical light-blocking filter has been applied to mitigate the influence of stray light. A comprehensive electro-optical characterization of CIS221-X has been completed. The median readout noise is 3.3 e − RMS with 90% of pixels reporting a value <3.6 e − RMS. At −40 ° C, the dark current is 12.4 ± 0.06 e − / pixel / s. The pixel photo-response is linear to within 1% for 0.3 to 5 keV photons (82 to 1370 e − ) with <0.1 % image lag. Following per-pixel gain correction, an energy resolution of 130.2 ± 0.4 eV has been measured at 5898 eV. In the 0.3 to 1.8 keV energy range, CIS221-X achieves >80 % quantum efficiency. With the exception of dark current, these results either meet or outperform the requirements for the THESEUS mission, strongly supporting the consideration of CMOS technology for soft x-ray astronomy.
CIS221-X is the first in a new generation of monolithic CMOS image sensors optimized for soft x-ray applications. The pixels are built on 35 μm thick, high-resistivity epitaxial silicon and feature Deep Depletion Extension (DDE) implants, facilitating over depletion by reverse substrate bias. When cooled to -40 °C, CIS221-X reports a readout noise of 3.3 e- RMS and 12.4 ± 0.06 e-/pixel/s of dark current. The 40μm pixels experience near-zero image lag. Following per-pixel gain correction, an energy resolution of 130 ± 0.4 eV FWHM has been measured at 5.9 keV. In the 0.3 – 1.8 keV energy range, the sensor achieves a quantum efficiency of above 80%. Radiation tests have shown that both the readout noise and dark current increase with total ionising dose and that the OBF can help to mitigate the increase in dark current. The measured electro-optical parameters and the preliminary ionising radiation results strongly support the use of the CIS221-X in soft x-ray applications.
Energy-dispersive imaging spectroscopy of X-ray emission from the Earth’s aurorae promises to further knowledge in the field of aeronomy. Time- and spatially-resolved observations of fluorescence from the dominant atmospheric components require the detection of X-rays as soft as 390 eV with a resolution of no more than 100 eV at these energies. The Auroral X-ray Imaging Spectrometer (AXIS) instrument of the Disturbed and quiet time Ionosphere-thermosphere System at High Altitudes (DISHA) mission is expected to perform these observations.
The baseline instrument design has suggested the use of an electron-multiplying charge-coupled device (EMCCD). The EMCCD’s electron-multiplying register can reduce the effective readout noise and enable the detection of signals as small as a single photoelectron. For the detection of soft X-rays, however, the noise penalty from the EM register’s stochastic process degrades energy resolution.
Emerging CMOS image sensors (CIS), particularly the Teledyne e2v CIS221-X test device, with back illumination, full depletion (with 36 μm thickness), large pixel sizes (40 μm), and low readout noise (3 e- rms effective) are expected to achieve the required performance without the effects of the EM register. Simple models for X-ray event sensitivity, detectability, and resolution, indicate that candidate CIS equal or better EMCCD performance. Furthermore, CIS offer other advantages including lower power consumption, higher operating temperature, and increased radiation hardness. However, these sensors introduce other behaviors that may impact their apparent benefits, which initial experimental testing and analyses are working to understand.
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