Probe tip of the Micro-coordinate Measuring Machine (Micro-CMM) is a microsphere with diameter of several hundred microns, and its sphericity is generally controlled at tens to hundreds of nanometers. Due to the small size and high precision requirement, the measurement of the microsphere morphology is difficult. In this paper, a measurement method for probe microsphere of Micro-CMM is proposed based on two SPM (Scanning Probe Microscope) probes, and a ruby microsphere of a Renishaw commercial CMM stylus is measured by the proposed method. In the experiment, the repeatability error of a maximum section profile is test, and the repeatability error is 41 nm (peak-to-peak value). Two perpendicular maximum section profiles are measured, and the corresponding diameter and roundness are estimated by the least squares method.
In this paper, an improved Interferometer was introduced which based on traditional Jamin Interferometer to solve the twin image where appear in on-axis holographic. Adjust the angle of reference light and object light that projected onto the CCD by change the reflector of the system to separate the zero order of diffraction, the virtual image and the real image, so that could eliminate the influence of the twin image. The result of analysis shows that the system could be realized in theory. After actually building the system, the hologram of the calibration plate is reconstructed and the result is shown to be feasible.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.