Dr. Lijuan Zou Profile

Dr. Lijuan Zou

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Publications (1)

Proceedings Article | 24 February 2021 Presentation + Paper

EUV single exposure via patterning at aggressive pitch

Jing Guo, Jennifer Church, Luciana Meli, Anuja de Silva, Martin Burkhardt, Karen Petrillo, Mary Breton, Cody Murray, Lijuan Zou, Allen Gabor, Nelson Felix

Proceedings Volume 11609, 116090U (2021) https://doi.org/10.1117/12.2582563

KEYWORDS: Optical lithography, Etching, Stochastic processes, Semiconducting wafers, Resolution enhancement technologies, Extreme ultraviolet lithography, Scanners, Inspection, Source mask optimization, Photoresist processing

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