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María Jesús López-Bosque
at Consejo Superior de Investigaciones Científicas
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Publications (1)
Proceedings Article | 24 April 2003 Paper
Semiconductor gas sensor compatibility with CMOS technologies
Maria Jesus Lopez-Bosque, Jose Antonio Plaza, Joaquin Santander, Isabel Gracia, Carles Cane, Juergen Wollenstein, Emmanuel Moretton, Armin Lambrecht, Kari Schjolberg-Henriksen
Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.499016
KEYWORDS: Semiconducting wafers, Silicon, Gas sensors, Glasses, Etching, Sensors, Platinum, CMOS technology, Electronics, Annealing
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