Ms. Maria Laura Gödecke Profile

Maria Laura Gödecke

Doctoral Candidate at Univ of Stuttgart

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Publications (5)

Proceedings Article | 20 March 2020 Paper

White-light Mueller-matrix Fourier scatterometry for the characterization of nanostructures with large parameter spaces

M. L. Gödecke, K. Frenner, W. Osten

Proceedings Volume 11325, 113250V (2020) https://doi.org/10.1117/12.2551276

KEYWORDS: Polarization, Scatterometry, Nanostructures, Refractive index, Microscopes, Optical inspection, Fourier spectroscopy, Mueller matrices

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Proceedings Article | 13 June 2017 Paper

Detection of grating asymmetries by phase-structured illumination

M. L. Gödecke, S. Peterhänsel, D. Buchta, K. Frenner, W. Osten

Proceedings Volume 10449, 104490C (2017) https://doi.org/10.1117/12.2269167

KEYWORDS: Semiconductors, Optical inspection, Scatterometry, Metrology, Phase measurement, Microscopy, Optical lithography, 3D metrology

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SPIE Journal Paper | 7 December 2016

Phase-structured illumination as a tool to detect nanometer asymmetries

Sandy Peterhänsel, Maria Laura Gödecke, Karsten Frenner, Wolfgang Osten

JM3, Vol. 15, Issue 04, 044005, (December 2016) https://doi.org/10.1117/12.10.1117/1.JMM.15.4.044005

KEYWORDS: Scatterometry, Diffraction gratings, Cameras, Polarization, Silicon, Semiconductors, Microscopes, Digital holography, Nanolithography, Holography

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Proceedings Article | 26 April 2016 Paper

Robust determination of asymmetric side wall angles by means of coherent scanning Fourier scatterometry

M. L. Gödecke, S. Peterhänsel, K. Frenner, W. Osten

Proceedings Volume 9890, 98900M (2016) https://doi.org/10.1117/12.2230380

KEYWORDS: Scatterometry, Diffraction gratings, Diffraction gratings, Polarization, Mirrors, Sensors, Silicon, Beam splitters

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Proceedings Article | 7 April 2016 Paper

Measurement of asymmetric side wall angles by coherent scanning Fourier scatterometry

M. L. Gödecke, S. Peterhänsel, K. Frenner, W. Osten

Proceedings Volume 9778, 97780G (2016) https://doi.org/10.1117/12.2218824

KEYWORDS: Diffraction gratings, Scatterometry, Inspection, Diffraction, Metrology, Optical metrology, Polarization, Sensors, Mirrors, Silicon

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