Dr. Marianne Hiltunen Profile

Dr. Marianne Hiltunen

Senior Scientist at VTT Technical Research Ctr of Finland Ltd

SPIE Involvement:

Author

Publications (12)

Proceedings Article | 28 February 2020 Paper

Polymer interposer for efficient light coupling into 3 µm silicon-on-insulator waveguides

Marianne Hiltunen, Mikko Harjanne, Tapani Vehmas, Ben Wälchli, Päivi Heimala, Timo Aalto

Proceedings Volume 11286, 112860I (2020) https://doi.org/10.1117/12.2541521

KEYWORDS: Waveguides, Polymers, Polymer multimode waveguides, Silicon, Oxides, Semiconducting wafers, Interfaces, Scanning electron microscopy, Fiber couplers

Read Abstract +

Proceedings Article | 15 May 2014 Paper

Toward large-area roll-to-roll printed nanophotonic sensors

Pentti Karioja, Jussi Hiltunen, Sanna Aikio, Teemu Alajoki, Jarkko Tuominen, Marianne Hiltunen, Samuli Siitonen, Ville Kontturi, Karl Böhlen, Rene Hauser, Martin Charlton, Arjen Boersma, Peter Lieberzeit, Thorsten Felder, David Eustace, Eliav Haskal

Proceedings Volume 9141, 91410D (2014) https://doi.org/10.1117/12.2052496

KEYWORDS: Sensors, Ultraviolet radiation, Photonic crystals, Polymers, Semiconducting wafers, Nanoimprint lithography, Manufacturing, Interferometers, Waveguides, Nanophotonics

Read Abstract +

Polymers have become an important material group in fabricating discrete photonic components and integrated optical devices. This is due to their good properties: high optical transmittance, versatile processability at relative low temperatures and potential for low-cost production. Recently, nanoimprinting or nanoimprint lithography (NIL) has obtained a plenty of research interest. In NIL, a mould is pressed against a substrate coated with a moldable material. After deformation of the material, the mold is separated and a replica of the mold is formed. Compared with conventional lithographic methods, imprinting is simple to carry out, requires less-complicated equipment and can provide high-resolution with high throughput. Nanoimprint lithography has shown potential to become a method for low-cost and high-throughput fabrication of nanostructures. We show the development process of nano-structured, large-area multi-parameter sensors using Photonic Crystal (PC) and Surface Enhanced Raman Scattering (SERS) methodologies for environmental and pharmaceutical applications. We address these challenges by developing roll-to-roll (R2R) UV-nanoimprint fabrication methods. Our development steps are the following: Firstly, the proof of concept structures are fabricated by the use of wafer-level processes in Si-based materials. Secondly, the master molds of successful designs are fabricated, and they are used to transfer the nanophotonic structures into polymer materials using sheet-level UV-nanoimprinting. Thirdly, the sheet-level nanoimprinting processes are transferred to roll-to-roll fabrication. In order to enhance roll-to-roll manufacturing capabilities, silicone-based polymer material development was carried out. In the different development phases, Photonic Crystal and SERS sensor structures with increasing complexities were fabricated using polymer materials in order to enhance sheet-level and roll-to-roll manufacturing processes. In addition, chemical and molecular imprint (MIP) functionalization methods were applied in the sensor demonstrators. In this paper, the process flow in fabricating large-area nanophotonic structures by the use of sheet-level and roll-to-roll UV- nanoimprinting is reported.

Proceedings Article | 1 May 2014 Paper

Polymer and composite polymer slot waveguides

Marianne Hiltunen, William Fegadolli, Hugo L. Lira, Pasi Vahimaa, Jussi Hiltunen, Sanna Aikio, Vilson Almeida, Pentti Karioja

Proceedings Volume 9133, 91331G (2014) https://doi.org/10.1117/12.2052251

KEYWORDS: Waveguides, Polymers, Silicon, Polarization, Resonators, Interferometers, Refractive index, Polymer multimode waveguides, Glucose, Sensors

Read Abstract +

Proceedings Article | 17 May 2012 Paper

Long single-mode waveguides made by imprint patterning for optical interconnects and sensors

Mikko Karppinen, Jussi Hiltunen, Anna Kokkonen, Jarno Petäjä, Noriyuki Masuda, Marianne Hiltunen, Jarkko Tuominen, Pentti Karioja

Proceedings Volume 8428, 842814 (2012) https://doi.org/10.1117/12.923621

KEYWORDS: Waveguides, Signal attenuation, Polymers, Manufacturing, Cladding, Optics manufacturing, Optical interconnects, Optical lithography, Sensors, Polymer multimode waveguides

Read Abstract +

Proceedings Article | 16 May 2012 Paper

Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films

L. Karvonen, A. Säynätjoki, X. Tu, T. Y. Liow, M. Hiltunen, J. Hiltunen, A. Tervonen, G. Q. Lo, S. Honkanen

Proceedings Volume 8431, 84311M (2012) https://doi.org/10.1117/12.921805

KEYWORDS: Waveguides, Silicon, Atomic layer deposition, Wave propagation, Refractive index, Lithography, Silicon films, Thin films, Deep ultraviolet, Titanium dioxide

Read Abstract +

Proceedings Article | 1 June 2011 Paper

UV-imprinting of single-mode polymeric waveguides

Jussi Hiltunen, Meng Wang, Marianne Hiltunen, Jarkko Puustinen, Jyrki Lappalainen, Stuart Pearce, Martin Charlton, Pentti Karioja

Proceedings Volume 8069, 80690U (2011) https://doi.org/10.1117/12.886782

KEYWORDS: Waveguides, Polymers, Polymer multimode waveguides, Composites, Coating, Geometrical optics, Sensors, Optical lithography, Cladding, Refractive index

Read Abstract +

Proceedings Article | 3 May 2011 Paper

Polymer based single and multislot waveguides

M. Hiltunen, J. Hiltunen, Antti Suutala, Jarkko Tuominen, Pentti Karioja

Proceedings Volume 8068, 806812 (2011) https://doi.org/10.1117/12.886815

KEYWORDS: Waveguides, Polymers, Polymer multimode waveguides, Refractive index, Photorefractive polymers, Finite element methods, Coating, Cladding, Etching, Titanium dioxide

Read Abstract +

Proceedings Article | 21 April 2008 Paper

Light transport in planar dielectric optical waveguides based on the aperiodic Thue-Morse sequence

Marianne Hiltunen, Jurgen Michel, Luca Dal Negro

Proceedings Volume 6989, 69890B (2008) https://doi.org/10.1117/12.781073

KEYWORDS: Waveguides, Fractal analysis, Dielectrics, Scattering, Refractive index, Silicon, Wave propagation, Interfaces, Transmittance, Titanium dioxide

Read Abstract +

Proceedings Article | 18 August 2004 Paper

Photo-crosslinkable hybrid material with improved aging stability for integrated optics

Maja Kusevic, Arto Maaninen, Jussi Hiltunen, Marianne Hiltunen, Jarkko Tuominen, Pentti Karioja

Proceedings Volume 5451, (2004) https://doi.org/10.1117/12.545488

KEYWORDS: Waveguides, Silicon, Signal attenuation, Refractive index, Integrated optics, Sol-gels, Interferometers, Zirconium dioxide, Materials processing, Optical components

Read Abstract +

Proceedings Article | 23 October 2002 Paper

Fabrication and characterization of Sb-doped Sn02 thin films derived from methacrylic-acid-modified tin(IV)alkoxides

Terho Kololuoma, Ari Tolonen, Leena-Sisko Johansson, Joseph Campbell, Ari Karkkainen, Marianne Hiltunen, Tomi Haatainen, Juha Rantala

Proceedings Volume 4804, (2002) https://doi.org/10.1117/12.453546

KEYWORDS: Tin, Antimony, Thin films, Crystals, Ions, Sodium, Doping, Metals, Oxides, Coating

Read Abstract +

Proceedings Article | 18 June 2002 Paper

Development of polymeric materials for waveguide components

Maja Kusevic, Marianne Hiltunen

Proceedings Volume 4640, (2002) https://doi.org/10.1117/12.443482

KEYWORDS: Silicon, Birefringence, Refractive index, Waveguides, Polymers, Sol-gels, Semiconducting wafers, Lithography, Glasses, Interferometers

Read Abstract +

Proceedings Article | 18 June 2002 Paper

Sol-gel technologies for multimode waveguide devices

Pentti Karioja, Maja Kusevic, Marianne Hiltunen, Janne Paaso, Jukka-Tapani Maekinen, Jussi Hiltunen, Kari Kautio, Harri Kopola

Proceedings Volume 4640, (2002) https://doi.org/10.1117/12.433291

KEYWORDS: Sol-gels, Waveguides, Tolerancing, Optical alignment, Ceramics, Systems modeling, Packaging, Optical lithography, 3D modeling, Manufacturing

Read Abstract +

Showing 5 of 12 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years