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Markus Rohdenburg
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Publications (1)
Proceedings Article | 22 February 2021 Presentation
Electron-induced chemistry fundamental to state-of-the-art nanotechnology
Petra Swiderek, Markus Rohdenburg, Neha Thakur, Sonia Castellanos
Proceedings Volume 11612, 116120B (2021) https://doi.org/10.1117/12.2584166
KEYWORDS: Chemistry, Nanotechnology, Extreme ultraviolet lithography, Electrons, Metals, Chemical reactions, Nanofabrication, Molecules, Electron beams, Radiation interaction with matter
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