Dr. Meik Panitz Profile

Dr. Meik Panitz

at JENOPTIK Optical Systems GmbH

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Publications (2)

Proceedings Article | 23 March 2020 Paper

Realization of thermally stable transmissive optical elements for the EUV wavelength range

G. Hergenhan, J. Taubert, D. Grimm, M. Tilke, M. Panitz, C. Ziener

Proceedings Volume 11323, 113232D (2020) https://doi.org/10.1117/12.2551869

KEYWORDS: Optical components, Silicon, Extreme ultraviolet, Etching, Isotropic etching, Chemical elements, Extreme ultraviolet lithography, Chromium, Ultra low expansion glass

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Proceedings Article | 24 January 2004 Paper

Electrostatic actuated optical Fabry-Perot switches in passive matrix displays

Thomas Knieling, Meik Panitz, Wolfgang Benecke

Proceedings Volume 5348, (2004) https://doi.org/10.1117/12.523344

KEYWORDS: Switches, Silicon, Switching, Fabry–Perot interferometers, Refractive index, Mirrors, Reflectivity, Quartz, Dielectrics, Oxides

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