Dr. Michael A. Robinson Profile

Dr. Michael A. Robinson

at Intel Corp

SPIE Involvement:

Author

Publications (5)

SPIE Journal Paper | 28 November 2022

Nanometrology for evaluating rare sites for molecular homogeneity

Michael Eller, Jander Cruz, Stanislav Verkhoturov, Michael Robinson, James Blackwell, Emile Schweikert

JM3, Vol. 21, Issue 04, 044002, (November 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.4.044002

KEYWORDS: Photoacid generators, Ions, Statistical analysis, Extreme ultraviolet, Stochastic processes, Correlation coefficients, Molecules, Mass spectrometry, Photoresist materials, Chemical analysis

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Proceedings Article | 11 November 2022 Presentation

Evaluating the role of photoacid generator and quencher loadings on EUV film homogeneity

Michael Eller, Jander Cruz, Stanislav Verkhoturov, Michael Robinson, James Blackwell, Emile Schweikert

Proceedings Volume PC12292, PC122920J (2022) https://doi.org/10.1117/12.2641539

KEYWORDS: Extreme ultraviolet, Ions, Quenching (fluorescence), Stochastic processes, Spectroscopy, Semiconductors, Polymers, Mass spectrometry, Data analysis, Data acquisition

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SPIE Journal Paper | 7 November 2022

Evaluating nanoscale molecular homogeneity in extreme ultraviolet resists with nanoprojectile secondary ion mass spectrometry

Jander Cruz, Stanislav Verkhoturov, Dmitriy Verkhoturov, Michael Robinson, James Blackwell, Michael Eller, Emile Schweikert

JM3, Vol. 21, Issue 04, 044001, (November 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.4.044001

KEYWORDS: Ions, Extreme ultraviolet, Polymers, Photoresist processing, Mass spectrometry, Stochastic processes, Diffusion, Molecular spectroscopy, Quenching (fluorescence), Gold

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Proceedings Article | 25 May 2022 Presentation + Paper

Nanometrology for evaluating rare sites for molecular homogeneity

Michael Eller, Jander Cruz, Stanislav Verkhorurov, Michael Robinson, James Blackwell, Emile Schweikert

Proceedings Volume 12055, 1205505 (2022) https://doi.org/10.1117/12.2612602

KEYWORDS: Ions, Statistical analysis, Stochastic processes, Molecules, Extreme ultraviolet, Photoresist materials, Mass spectrometry, Extreme ultraviolet lithography

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Proceedings Article | 25 May 2022 Paper

Evaluating nanoscale molecular homogeneity in EUV resists with nano-projectile SIMS

Jander Cruz, Michael Eller, Stanislav Verkhoturov, Dmitriy Verkhoturov, Michael Robinson, James Blackwell, Emile Schweikert

Proceedings Volume 12055, 120550I (2022) https://doi.org/10.1117/12.2614059

KEYWORDS: Ions, Polymers, Extreme ultraviolet, Extreme ultraviolet lithography, Diffusion, Stochastic processes, Mass spectrometry

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