Dr. Min Hu Profile

Dr. Min Hu

at Univ Freiburg

SPIE Involvement:

Author

Publications (5)

Proceedings Article | 12 April 2005 Paper

Dynamic testing of micro devices using PZT base excitation

Min Hu, Jin Xie, Shih-Fu Ling, Hejun Du, Yongqing Fu

Proceedings Volume 5852, (2005) https://doi.org/10.1117/12.621754

KEYWORDS: Ferroelectric materials, Ceramics, Thin films, Radon, Doppler effect, Laser Doppler velocimetry, Deep reactive ion etching, Thin film deposition, Microsystems, Beam shaping

Read Abstract +

Proceedings Article | 12 April 2005 Paper

Fabrication and characterization of piezoelectric cantilever for micro transducers

Jin Xie, Min Hu, Shih-Fu Ling, Hejun Du

Proceedings Volume 5852, (2005) https://doi.org/10.1117/12.621532

KEYWORDS: Ferroelectric materials, Sol-gels, Thin films, Thin film deposition, Electrodes, Platinum, Diffusion, Deposition processes, Crystals, Polarization

Read Abstract +

Proceedings Article | 28 February 2005 Paper

Micromirror structure based on TiNi shape memory thin films

Yong Qing Fu, Min Hu, Hejun Du, Jack Luo, Andrew Flewitt, William Milne

Proceedings Volume 5649, (2005) https://doi.org/10.1117/12.567317

KEYWORDS: Micromirrors, Silicon, Electrodes, Mirrors, Etching, Thin films, Microelectromechanical systems, Temperature metrology, Semiconducting wafers, Beam shaping

Read Abstract +

Proceedings Article | 23 February 2005 Paper

Fabrication of PZT microdevices using a high-yield sol-gel process

Min Hu, Hejun Du, Jin Xie, Shih-Fu Ling, Yongqing Fu

Proceedings Volume 5650, (2005) https://doi.org/10.1117/12.581395

KEYWORDS: Ferroelectric materials, Thin films, Sol-gels, Electrodes, Platinum, Thin film devices, Etching, Silicon, Wet etching, Silicon films

Read Abstract +

Proceedings Article | 21 March 2001 Paper

Motion control of an electrostrictive actuator

Min Hu, Hejun Du, Shih-Fu Ling

Proceedings Volume 4235, (2001) https://doi.org/10.1117/12.420873

KEYWORDS: Actuators, Detection and tracking algorithms, Control systems, Motion controllers, Signal processing, Complex systems, Sensors, Ceramics, Motion models, Electrostriction

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years