This paper introduced an optical method for measuring the thickness of solid thin films. This method is of high
measuring speed, noncontact and online work. An experimental system has been constructed for on-line
measurement of the thickness of thin film. The experimental results show that the measuring error is lower than 10%
in the range of 10~100μm , which fit the production need.
In this paper the photoelectric characteristics of three-channel bulk charge-coupled device (BCCD) are simulated in the region of near-IR. The results show that the germanium three-channel BCCD cannot realize multispectral imaging in the region of near-IR because of germanium’s absorption coefficient. Basing on the result of theoretical research the absorption coefficient curve of a new substrate material has been found, which can realize multispectral imaging in the region of near-IR. The simulating results show that the spectral photosensitivity of three-channel BCCD made by the new material have three maximal positions at 1.0μm,1.1μm and 1.26μm respectively.
This paper studied the image-forming characteristic of a CCD and discussed the influence of the carrier diffusion on the single pixel and whole array of CCD. Other factors have also been studied such as quantum efficiency, charge transfer, different kinds of CCD channels and the phase match between input signal and CCD pixel. Basing on above works the comprehensive model has been proposed for modulation transfer function of non-ideal CCD.
This paper gives the general formula of modulation transfer function for the CCD pixels with arbitrary geometric shape. Based on the formula the modulation transfer functions of CCD are compared between the square and trapezoid pixels with square sampling array. The results show that the modulation transfer function of the square pixel is better than the one of trapezoid pixel.
In this paper the photoelectric characteristics of the three-channel bulk charge-coupled device (BCCD) was simulated in the region of x-ray. The results show that the silicon three-channel BCCD can not work in the region of x- ray because of improper absorption coefficient of silicon. The absorption coefficient curve of a new material is given in this paper. By using the absorption coefficient of the new material, three maxim positions of the spectral photosensitivity are obtained at 1.8kev, 1.2kev and 0.6kev, respectively.
This paper presents a method for acquiring sine grating pattern of dynamic varying frequency using for measuring the modulation transfer function (MTF) of CCD. The measured results show that the spatial frequencies of grating patterns generated by this method can be continuously changed within the range of 0.2 to 80 lp/mm, the frequent of which is lower than 1 lp/mm. The modulation contrast of patterns is close to one. We have used them to measure the MTF of area array and linear CCD, and the result are satisfactory.
This paper shows that the phase match between input signal and CCD pixel has influence on the measuring results of MTF by the analysis of the CCD sampling process. We have obtained the situation that MTF values of linear CCD change with the phase of input signal using the setup made by ourselves. The results accord with the theory results.
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