Dr. Minghua Li Profile

Dr. Minghua Li

at A*STAR Institute of Microelectronics

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Publications (1)

Proceedings Article | 12 March 2024 Presentation + Paper

Scandium-doped aluminum nitride photonic integration platform

Nanxi Li, Wing Wai Chung, Jia Sheng Goh, Yat Fung Tsang, Landobasa Y. Tobing, Chong Pei Ho, Binni Varghese, Leh Woon Lim, Minghua Li, Huamao Lin, Qingxin Zhang, Doris K. Ng, Lennon Y. Lee, Xianshu Luo

Proceedings Volume 12889, 128890D (2024) https://doi.org/10.1117/12.3004598

KEYWORDS: Waveguides, Aluminum nitride, Microrings, Photonic integrated circuits, Microresonators, Scandium, Harmonic generation, Optical properties, Semiconducting wafers, Resonators

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