A photoelectric autocollimator employing an area Charge Coupled Device (CCD) as its target receiver, which is specially used in numerical stage calibration is optimized, and the various error factors are analyzed. By using the ZEMAX software, the image qualities are optimized to ensure the spherical and coma aberrations of the collimating system are less than 0.27mm and 0.035mm respectively; the Root Mean Square (RMS) radius is close to 6.45 microns, which is identified with the resolution of the CCD, and the Modulation Transfer Function (MTF) is greater than 0.3 in the full field of view, 0.5 in the centre field at the corresponding frequency. The errors origin mainly from fabrication and alignment, which are all about 0.4" . The error synthesis shows that the instrument can meet the demands of the design accuracy, which is also consistent with the experiment.
A photoelectric autocollimator of large measuring range for detecting position accuracy of NC rotary table is
designed. The autocollimator has a measurement range of ±30'. The measurement accuracy and the resolution of the
autocollimator are 2" and 0.32" respectively. The autocollimator applies an area CCD camera as its detector, which can
realize two-axis measuring at the same time and automatically detect the position of the rotary table.
The important components of the autocollimator are designed such as objective lens, ocular lens, cross reticule,
beam splitter prism. A LED light is used in the autocollimator for its high brightness. Using the ZEMAX optical design
program, the light path of the system is analyzed and optimized to ensure the spherical aberration within
-0.05mm~+0.05mm and the sine aberration of 0.0003mm. The MTF value of field of view is more than 0.5 at the half
Nyquist frequency. The MTF is higher than 0.3 within 0.7 FOV at the Nyquist frequency. RMS radiuses are less than
Airy disk.
The mechanical structure of the autocollimator is designed. And two adjusting devices to regulate the position of the
reticule and the objective lens are designed to ensure the reticule at the right position and to get an excellent imaging
performance in CCD.
The performance of the debugging sample machine has been tested, The error of indication of the autocollimator is
contrasted and the result is consistent with the specification above.
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