We demonstrate the capability of 100-GB density recording by electron beam mastering and readout by a near-field optical pickup with an effective NA of 2.05 and a blue LD of 405-nm wavelength. A silicon (Si) disk of 100-GB density is fabricated by an optimized Si etching process condition to form suitable pit pattern shapes for the near-field readout.
We improved the electron beam recorder with a differential pumping head for higher density discs and mass production. The beam diameters were improved by exchanging the aperture size of the objective lens and beam stability were also improved by adding a sound proof case. As for the performance of the improved electron beam recorder, we showed that a 104Gb/in2 (150GB capacity/layer) density disc with EFM plus modulation codes can be fabricated. We also improved the pit shape uniformity and a margin of the process by introducing the appropriate write strategy that is simulated by the Monte Carlo simulation to the recording pulses.
We have achieved high density near field readout of a 100 GB capacity (69.5 Gbit/in2) disc by using a solid immersion lens with numerical aperture of 2.05. In order to realize the solid immersion lens wtih numerical aperture of 2.05, the solid immersion lens was made from Bi4Ge3O12 mono-crystal. The refractive index of Bi4Ge3O12 is 2.23 at the wavelegnth of 405 nm. A conventional optical pick-up actuator with the solid immersion lens was used for the near field optical disc system. We confirmed that the near field readout system is promising method of realizing a high density optical disc system.
KEYWORDS: Tolerancing, Magnetism, Reactive ion etching, Molybdenum, Switching, Objectives, Digital video discs, Annealing, Signal processing, Modulation
Domain Wall Displacement Detection (DWDD) medium with no annealing method, which we call "anneal-less" DWDD medium, has been improved for practical use. The key technologies of our progress are not only an optimum design of the magnetic film structure but also a deep groove substrate for land-groove recording with a quite unique groove form. The substrate was prepared by using the mastering process with a reactive ion etching (RIE) method. We achieved 15 Gbit/in2-areal density with wide system tolerances using the anneal-less DWDD medium, a 660nm-laser and a 0.60 NA objective lens. The areal density corresponds to 4.7 GB-capacity on a disc like MiniDisc (MD) wiht a 64 mm-diameter.
KEYWORDS: Silicon, Electron beams, Eye, Etching, Near field, Near field optics, Signal processing, Reactive ion etching, Modulation, Atomic force microscopy
We have demonstrated the capability of 100GB density recording by the electron beam mastering and readout by a near-field optical pick-up with an effective NA of 2.05 and a blue LD of 405 nm wavelength. The Si disc of 100GB density was fabricated by the optimized Si etching process condition to form suitable pit pattern shape for the near-field readout.
KEYWORDS: Deep ultraviolet, Signal processing, Bragg cells, Signal analyzers, Semiconductor lasers, Digital video discs, Interference (communication), Second-harmonic generation, Silica, Objectives
Recent progress in blue laser diodes requires the development of ultra-high density mastering corresponding to several times higher density than the digital versatile disc (DVD).
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