Though laser repairing can smooth the surfaces of laser damaged optical elements, it is difficult to compensate all the stress in them. Therefore, residual stress detection and compensation are significant as surface smoothing during laser repairing. In order to quantitatively detect the residual stress especially in laser damage detection and laser repairing quality evaluation, we plan to use polarized digital holography to measure and analyze the residual stress distribution inside the target; and we also propose the numerical model of quantitative stress detection using the polarized digital holography. Since the polarized digital holography can reconstruct the residual stress in high resolution, fast speed and high accuracy, the proposed method can be a potential tool in laser damage detection and laser repairing quality evaluation in high power laser fields.
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