Prof. Nico F. de Rooij Profile

Prof. Nico F. de Rooij

Director at Ecole Polytechnique Fédérale de Lausanne

SPIE Involvement:

Author

Publications (58)

Proceedings Article | 21 November 2017 Open Access

Open Access

Paper

MOEMs devices for future astronomical instrumentation in space

Frédéric Zamkotsian, Arnaud Liotard, Patrick Lanzoni, Kacem ElHadi, Severin Waldis, Wilfried Noell, Nico de Rooij, Veronique Conedera, Norbert Fabre, Sylvaine Muratet, Henri Camon

Proceedings Volume 10567, 105672P (2017) https://doi.org/10.1117/12.2308036

KEYWORDS: Actuators, Mirrors, Micromirrors, Microopto electromechanical systems, Polymers, Space telescopes, Aerospace engineering, Molybdenum, Deformable mirrors, Electrodes

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Proceedings Article | 9 March 2013 Paper

Paper

High-temperature compatible 3D-integration processes for a vacuum-sealed CNT-based NEMS

R. Gueye, S. W. Lee, T. Akiyama, D. Briand, C. Roman, C. Hierold, N. de Rooij

Proceedings Volume 8614, 86140H (2013) https://doi.org/10.1117/12.2006216

KEYWORDS: Glasses, Semiconducting wafers, Microelectromechanical systems, Gold, Resonators, Silicon, Electronics, Wafer bonding, Aluminum, Nanoelectromechanical systems

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Proceedings Article | 9 March 2013 Paper

Paper

Reliability characteristics of microfabricated Rb mini-lamps for optical pumping in miniature atomic clocks and magnetometers

Vinu Venkatraman, Yves Pétremand, Nico de Rooij, Herbert Shea

Proceedings Volume 8614, 861406 (2013) https://doi.org/10.1117/12.2006032

KEYWORDS: Rubidium, Lamps, Dielectrics, Microfabrication, Plasma, Light sources, Atomic clocks, Reliability, Optical pumping, Electrodes

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Proceedings Article | 13 September 2012 Paper

Paper

Large micromirror array for generating programmable slit masks for multi-object spectroscopy

Michael Canonica, Frederic Zamkotsian, Patrick Lanzoni, Wilfried Noell, Nico de Rooij

Proceedings Volume 8450, 84501E (2012) https://doi.org/10.1117/12.927144

KEYWORDS: Micromirrors, Mirrors, Electrodes, Cryogenics, Semiconducting wafers, Molybdenum, Gold, Space telescopes, Astronomical imaging, Wafer bonding

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Proceedings Article | 16 February 2012 Paper

Paper

Low voltage vertical flaps arrays as optical modulating elements for reflective display and switchable gratings

F. Jutzi, W. Noell, N. F. de Rooij

Proceedings Volume 8252, 82520J (2012) https://doi.org/10.1117/12.906631

KEYWORDS: Reflective displays, Electrodes, Reflectivity, Camera shutters, Modulation, Optical components, Optical arrays, Optical design, Velocity measurements, Silica

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Proceedings Article | 16 February 2012 Paper

Paper

Dynamically deformable reflective membrane for laser beam shaping and smoothing

J. Masson, R. Bitterli, A. Bich, W. Noell, R. Voelkel, K. Weible, N. de Rooij

Proceedings Volume 8252, 82520K (2012) https://doi.org/10.1117/12.909092

KEYWORDS: Micromirrors, Semiconducting wafers, Beam shaping, Optical simulations, Reflectivity, Diffusers, Diffraction, Silicon, Actuators, Wafer-level optics

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Proceedings Article | 16 February 2012 Paper

Paper

Large MEMS-based programmable reflective slit mask for multi-object spectroscopy fabricated using multiple wafer-level bonding

Michael Canonica, Frederic Zamkotsian, Patrick Lanzoni, Wilfried Noell, Nico de Rooij

Proceedings Volume 8252, 82520B (2012) https://doi.org/10.1117/12.910094

KEYWORDS: Micromirrors, Mirrors, Electrodes, Cryogenics, Semiconducting wafers, Gold, Reflectivity, Astronomical imaging, Coating, Wafer bonding

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Proceedings Article | 15 February 2011 Paper

Paper

Microfabricated mirrors for space applications

Dara Bayat, Caglar Ataman, Benedikt Guldimann, Sébastien Lani, Wilfried Noell, Nico de Rooij

Proceedings Volume 7930, 79300W (2011) https://doi.org/10.1117/12.875038

KEYWORDS: Space mirrors, Mirrors, Microfabrication, Microopto electromechanical systems, Current controlled current source, Beam steering, Actuators

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Proceedings Article | 14 February 2011 Paper

Paper

Shaping light with MOEMS

W. Noell, S. Weber, J. Masson, J. Extermann, L. Bonacina, A. Bich, R. Bitterli, H. P. Herzig, D. Kiselev, T. Scharf, R. Voelkel, K. Weible, J.-P. Wolf, N. de Rooij

Proceedings Volume 7930, 79300P (2011) https://doi.org/10.1117/12.873051

KEYWORDS: Mirrors, Diffusers, Microopto electromechanical systems, Actuators, Micromirrors, Silicon, Ultraviolet radiation, Beam shaping, Pulse shaping, Magnetism

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Proceedings Article | 14 February 2011 Paper

Paper

Vertical electrostatically 90° turning flaps for reflective MEMS display

Fabio Jutzi, Wilfried Noell, Nico de Rooij

Proceedings Volume 7930, 79300H (2011) https://doi.org/10.1117/12.873840

KEYWORDS: Reflectivity, Electrodes, Reflective displays, Finite element methods, Microelectromechanical systems, Photomasks, Light sources, Optical fabrication, Electroluminescence, Switching

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Proceedings Article | 14 February 2011 Paper

Paper

MEMS-based programmable reflective slit mask for multi-object spectroscopy

Michael Canonica, Frederic Zamkotsian, Patrick Lanzoni, Wilfried Noell, Nico de Rooij

Proceedings Volume 7930, 79300N (2011) https://doi.org/10.1117/12.874438

KEYWORDS: Micromirrors, Mirrors, Electrodes, Semiconducting wafers, Photomasks, Astronomical imaging, Wafer bonding, Deep reactive ion etching, Gold, Oxides

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Proceedings Article | 18 August 2010 Paper

Paper

Ink-jet printed colorimetric gas sensors on plastic foil

Jerome Courbat, Danick Briand, Nico de Rooij

Proceedings Volume 7779, 77790A (2010) https://doi.org/10.1117/12.861142

KEYWORDS: Waveguides, Sensors, Gas sensors, Polymers, Printing, Positron emission tomography, Inkjet technology, Electronics, Polymer thin films, Light emitting diodes

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Proceedings Article | 20 July 2010 Paper

Paper

Development of MEMS-based programmable slit mask for multi-object spectroscopy

Michael Canonica, Severin Waldis, Frederic Zamkotsian, Patrick Lanzoni, Wilfried Noell, Nico De Rooij

Proceedings Volume 7739, 77394Q (2010) https://doi.org/10.1117/12.858258

KEYWORDS: Micromirrors, Electrodes, Mirrors, Molybdenum, Cryogenics, Astronomical imaging, Spectroscopes, Space telescopes, Silicon, Infrared telescopes

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Proceedings Article | 28 April 2010 Paper

Paper

Evaluation of the frequency stability of a VCSEL locked to a micro-fabricated Rubidium vapour cell

J. Di Francesco, F. Gruet, C. Schori, C. Affolderbach, R. Matthey, G. Mileti, Y. Salvadé, Y. Petremand, N. De Rooij

Proceedings Volume 7720, 77201T (2010) https://doi.org/10.1117/12.854147

KEYWORDS: Vertical cavity surface emitting lasers, Rubidium, Laser stabilization, Absorption, Glasses, Microfabrication, Semiconductor lasers, Silicon, Ions, Semiconducting wafers

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Proceedings Article | 17 February 2010 Paper

Paper

Deformable silicon membrane for dynamic linear laser beam diffuser

J. Masson, A. Bich, H. P. Herzig, R. Bitterli, W. Noell, T. Scharf, R. Voelkel, K. Weible, N. de Rooij

Proceedings Volume 7594, 75940F (2010) https://doi.org/10.1117/12.842015

KEYWORDS: Diffusers, Mirrors, Silicon, Aluminum, Semiconductor lasers, Magnetism, Actuators, Coating, Deep reactive ion etching, Crystals

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Proceedings Article | 17 February 2010 Paper

Paper

High aspect ratio micromirror array with two degrees of freedom for femtosecond pulse shaping

Stefan Weber, Wilfried Noell, Sébastien Lani, Fabio Jutzi, Peter Brühlmeier, Denis Kiselev, Jérôme Extermann, Luigi Bonacina, Jean-Pierre Wolf, Nico de Rooij

Proceedings Volume 7594, 75940J (2010) https://doi.org/10.1117/12.840847

KEYWORDS: Mirrors, Actuators, Gold, Microelectromechanical systems, Micromirrors, Femtosecond phenomena, Packaging, Femtosecond pulse shaping, Reflectivity, Microopto electromechanical systems

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Proceedings Article | 17 February 2010 Paper

Paper

Realization and characterization of a MEMS-based programmable slit mask for multi-object spectroscopy

Michael Canonica, Severin Waldis, Frederic Zamkotsian, Patrick Lanzoni, Wilfried Noell, Nico de Rooij

Proceedings Volume 7594, 75940P (2010) https://doi.org/10.1117/12.841547

KEYWORDS: Micromirrors, Mirrors, Electrodes, Semiconducting wafers, Molybdenum, Microfabrication, Cryogenics, Astronomical imaging, Space telescopes, Silicon

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Proceedings Article | 22 August 2009 Paper

Paper

Dynamic MEMS-based linear (1D) diffusers for laser beam homogenizing and beam shaping

J. Masson, A. Bich, W. Noell, R. Voelkel, K. Weible, N. De Rooij

Proceedings Volume 7430, 74300H (2009) https://doi.org/10.1117/12.827663

KEYWORDS: Diffusers, Electrodes, Silicon, Actuators, Mirrors, Optical simulations, Beam shaping, Semiconducting wafers, Finite element methods, Prototyping

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Proceedings Article | 24 February 2009 Paper

Paper

Large micromirror array for multi-object spectroscopy in a cryogenic environment

Michael Canonica, Severin Waldis, Frederic Zamkotsian, Patrick Lanzoni, Pierre-Andre Clerc, Wilfried Noell, Nico de Rooij

Proceedings Volume 7208, 72080K (2009) https://doi.org/10.1117/12.811117

KEYWORDS: Micromirrors, Mirrors, Electrodes, Cryogenics, Silicon, Astronomical imaging, Space telescopes, Telescopes, Molybdenum, Optical alignment

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Proceedings Article | 19 February 2009 Paper

Paper

Linear micromirror array for broadband femtosecond pulse shaping in phase and amplitude

Stefan Weber, Severin Waldis, Wilfried Noell, Denis Kiselev, Jérôme Extermann, Luigi Bonacina, Jean-Pierre Wolf, Nico de Rooij

Proceedings Volume 7208, 720805 (2009) https://doi.org/10.1117/12.808162

KEYWORDS: Mirrors, Micromirrors, Femtosecond phenomena, Phase shift keying, Ultraviolet radiation, Femtosecond pulse shaping, Amplitude modulation, Pulse shaping, Deep reactive ion etching, Microelectromechanical systems

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Proceedings Article | 25 July 2008 Paper

Paper

Micromirror array for multiobject spectroscopy in ground-based and space telescopes

Severin Waldis, Frederic Zamkotsian, Patrick Lanzoni, Wilfried Noell, Nico de Rooij

Proceedings Volume 7018, 70182S (2008) https://doi.org/10.1117/12.790358

KEYWORDS: Micromirrors, Mirrors, Cryogenics, Space telescopes, Coating, Astronomical imaging, Silicon, Infrared spectroscopy, Telescopes, Spectroscopy

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SPIE Journal Paper | 1 April 2008

Uniform tilt-angle micromirror array for multiobject spectroscopy

Severin Waldis, Frederic Zamkotsian, Pierre-Andre Clerc, Wilfried Noell, Michael Zickar, Patrick Lanzoni, Nicolaas de Rooij

JM3, Vol. 7, Issue 02, 021014, (April 2008) https://doi.org/10.1117/12.10.1117/1.2920338

KEYWORDS: Mirrors, Micromirrors, Electrodes, Cryogenics, Astronomical imaging, Semiconducting wafers, Spectroscopy, Deep reactive ion etching, Coating, Spectrographs

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Proceedings Article | 14 February 2008 Paper

Paper

Interferometric characterization of MOEMS devices in cryogenic environment for astronomical instrumentation

Frederic Zamkotsian, Emmanuel Grassi, Severin Waldis, Rudy Barette, Patrick Lanzoni, Christophe Fabron, Wilfried Noell, Nico de Rooij

Proceedings Volume 6884, 68840D (2008) https://doi.org/10.1117/12.768410

KEYWORDS: Mirrors, Micromirrors, Cryogenics, Interferometry, Molybdenum, Space telescopes, Silicon, Microopto electromechanical systems, Gold, Astronomical imaging

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Proceedings Article | 14 February 2008 Paper

Paper

Multifunctional micro-optical elements for laser beam homogenizing and beam shaping

A. Bich, J. Rieck, C. Dumouchel, S. Roth, K. Weible, M. Eisner, R. Voelkel, M. Zimmermann, M. Rank, M. Schmidt, R. Bitterli, N. Ramanan, P. Ruffieux, T. Scharf, W. Noell, H.-P. Herzig, Nico De Rooij

Proceedings Volume 6879, 68790Q (2008) https://doi.org/10.1117/12.762923

KEYWORDS: Diffusers, Microlens array, Microlens, Beam homogenizers, Laser applications, Homogenization, Telescopes, Beam shaping, Diffraction, Mirrors

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Proceedings Article | 13 February 2008 Paper

Paper

Micromirrors for multiobject spectroscopy: optical and cryogenic characterization

Severin Waldis, Frederic Zamkotsian, Patrick Lanzoni, Wilfried Noell, Nico de Rooij

Proceedings Volume 6887, 68870B (2008) https://doi.org/10.1117/12.764381

KEYWORDS: Micromirrors, Mirrors, Cryogenics, Coating, Silicon, Gold, Reflectivity, Thin films, Infrared radiation, Astronomical imaging

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Proceedings Article | 14 February 2007 Paper

Paper

Compact large-stroke piston tip-tilt actuator and mirror

W. Noell, A. Hugi, T. Overstolz, R. Stanley, S. Waldis, N. de Rooij

Proceedings Volume 6467, 64670Q (2007) https://doi.org/10.1117/12.698937

KEYWORDS: Mirrors, Photomasks, Actuators, Beam shaping, Electrodes, Oxides, Deep reactive ion etching, Micromirrors, Adaptive optics, Etching

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Proceedings Article | 22 January 2007 Paper

Paper

Uniform tilt-angle micromirror array for multi-object spectroscopy

Severin Waldis, Pierre-Andre Clerc, Frederic Zamkotsian, Michael Zickar, Wilfried Noell, Nico de Rooij

Proceedings Volume 6466, 646603 (2007) https://doi.org/10.1117/12.702012

KEYWORDS: Mirrors, Electrodes, Micromirrors, Space telescopes, Astronomical imaging, Spectrographs, Astronomy, Silicon, Spectroscopy, Semiconducting wafers

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Proceedings Article | 6 July 2006 Paper

Paper

Micro-mirror array for multi-object spectroscopy

Frederic Zamkotsian, Severin Waldis, Wilfried Noell, Kacem ElHadi, Patrick Lanzoni, Nico de Rooij

Proceedings Volume 6273, 62731Q (2006) https://doi.org/10.1117/12.671911

KEYWORDS: Micromirrors, Mirrors, Astronomical imaging, Molybdenum, Electrodes, James Webb Space Telescope, Space telescopes, Spectrographs, Telescopes, Microopto electromechanical systems

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Proceedings Article | 21 April 2006 Paper

Paper

Compact and stress-released piston tip-tilt mirror

W. Noell, T. Overstolz, R. Stanley, N. de Rooij

Proceedings Volume 6186, 61860H (2006) https://doi.org/10.1117/12.666511

KEYWORDS: Mirrors, Oxides, Beam shaping, Electrodes, Microtechnology, Actuators, Adaptive optics, Optical lithography, Deep reactive ion etching, Interferometers

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Proceedings Article | 21 April 2006 Paper

Paper

A 2D MEMS stage for optical applications

Caglar Ataman, Yves Petremand, Wilfried Noell, Hakan Ürey, Marc Epitaux, Nico de Rooij

Proceedings Volume 6186, 618603 (2006) https://doi.org/10.1117/12.664777

KEYWORDS: Microelectromechanical systems, Actuators, Microlens, Instrument modeling, Microlens array, Motion models, Linear filtering, Etching, Control systems, Scanners

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Proceedings Article | 23 January 2006 Paper

Paper

High-fill factor micro-mirror array for multi object spectroscopy

Severin Waldis, Pierre-Andre Clerc, Frederic Zamkotsian, Michael Zickar, Wilfried Noell, Nico de Rooij

Proceedings Volume 6114, 611408 (2006) https://doi.org/10.1117/12.647493

KEYWORDS: Mirrors, Electrodes, Micromirrors, Semiconducting wafers, Photomasks, Deep reactive ion etching, Astronomical imaging, Spectrographs, Silicon, Molybdenum

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Proceedings Article | 16 August 2004 Paper

Paper

Design and fabrication of a circular digital variable optical attenuator

Winston Sun, Junaid Mughal, Frank Perez, Nabeel Riza, Wilfried Noell, Nicolaas de Rooij

Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.544997

KEYWORDS: Mirrors, Electrodes, Semiconducting wafers, Oxides, Quartz, Variable optical attenuators, Signal attenuation, Deep reactive ion etching, Bridges, Neodymium

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Proceedings Article | 16 August 2004 Paper

Paper

MEMS tunable filter for telecom applications

Thomas Overstolz, Guido Niederer, Wilfried Noell, Michael Gale, Hans Peter Herzig, Samuel Obi, Hans Thiele, Nicolaas de Rooij

Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.545581

KEYWORDS: Optical filters, Microelectromechanical systems, Actuators, Waveguides, Electrodes, Silicon, Deep reactive ion etching, Polarization, Capacitors, Etching

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Proceedings Article | 16 August 2004 Paper

Paper

4x4 and 8x8 optical cross connect for optical fiber networks

Michael Zickar, Wilfried Noell, Cornel Marxer, Nicolaas de Rooij

Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.544915

KEYWORDS: Mirrors, Optical fibers, Electrodes, Actuators, Switches, Optical components, Collimators, Optical alignment, Optical networks, Microopto electromechanical systems

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Proceedings Article | 16 August 2004 Paper

Paper

Infrared MEMS-based Lamellar grating spectrometer

Omar Manzardo, Felix Shadelin, Wilfried Noell, Nicolaas de Rooij, Hans Peter Herzig

Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.545587

KEYWORDS: Spectroscopy, Mirrors, Diffraction gratings, Sensors, Diffraction, Xenon, Lamps, Interferometers, Actuators, Semiconductor lasers

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Proceedings Article | 19 November 2003 Paper

Paper

Micro-fabricated spectral analysers

Omar Manzardo, Yves Petremand, Hans-Peter Herzig, Wilfried Noell, Nico de Rooij

Proceedings Volume 4829, (2003) https://doi.org/10.1117/12.530940

KEYWORDS: Optical fibers, Mirrors, Diffraction gratings, Silicon, Beam splitters, Interferometers, Michelson interferometers, Actuators, Optical components, Spectrometers

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Proceedings Article | 24 April 2003 Paper

Paper

Fabrication of nano-interdigitated electrodes

Luca Berdondini, Martin Kalbac, Sebastien Gautsch, Maurizio Gullo, Urs Staufer, Milena Koudelka-Hep, Nico de Rooij

Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.488975

KEYWORDS: Electrodes, Electron beam lithography, Nanolithography, Standards development, Optical lithography, Platinum, Atomic force microscopy, Scanning electron microscopy, Semiconducting wafers, Thin films

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Proceedings Article | 21 January 2003 Paper

Paper

Development of 1X4 micro-optical switch based on SOI vertical micromirror technology

Zhenfeng Wang, Xue Chuan Shan, Zhiping Wang, Wenqing Cao, Jianfeng Xu, Siak-Piang Lim, Wilfried Noell, Nico de Rooij

Proceedings Volume 4983, (2003) https://doi.org/10.1117/12.472787

KEYWORDS: Mirrors, Switches, Optical switching, Actuators, Packaging, Silicon, Deep reactive ion etching, Finite element methods, Fiber optics, Micromirrors

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Proceedings Article | 16 January 2003 Paper

Paper

Reciprocating silicon microtribometer

Philippe Dubois, Stephane von Gunten, August Enzler, Urs Lippuner, Alex Dommann, Nicolaas-F. de Rooij

Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.478200

KEYWORDS: Silicon, Finite element methods, Optical simulations, Silicon films, Deep reactive ion etching, Semiconducting wafers, Aluminum, Thin films, Photomasks, Crystals

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Proceedings Article | 19 April 2002 Paper

Paper

Silicon as material for mechanical wristwatches

Andre Perret, Arno Hoogerwerf, Philippe Niedermann, Xiao-Ming Tang, Sylvain Jeanneret, Pierre-Andre Clerc, Nico de Rooij, Pierre Gygax

Proceedings Volume 4755, (2002) https://doi.org/10.1117/12.462866

KEYWORDS: Silicon, Microelectromechanical systems, Etching, Semiconducting wafers, Oxides, Deep reactive ion etching, Nickel, Magnetism, Manufacturing equipment, Ions

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Proceedings Article | 19 April 2002 Paper

Paper

Development of a new 1x4 micro-optical switch

Zhiping Wang, Xue Shan, Z. Wang, Siak-Piang Lim, K. Lee, Wilfried Noell, Nico de Rooij

Proceedings Volume 4755, (2002) https://doi.org/10.1117/12.462854

KEYWORDS: Mirrors, Optical switching, Switching, Silicon, Switches, Deep reactive ion etching, Reflection, Structured optical fibers, Actuators, Single mode fibers

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Proceedings Article | 28 September 2001 Paper

Paper

High-speed electrostatic gas microvalve switching behavior

Philippe Dubois, Benedikt Guldimann, Nico de Rooij

Proceedings Volume 4560, (2001) https://doi.org/10.1117/12.443061

KEYWORDS: Switching, Modulation, Aluminum, Microelectromechanical systems, Silicon, Electrodes, Etching, Nitrogen, Deep reactive ion etching, Beam shaping

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SPIE Journal Paper | 1 May 2001

Microlens systems for fluorescence detection in chemical microsystems

Jean-Christophe Roulet, Reinhard Voelkel, Hans Peter Herzig, Sabeth Verpoorte, Nico de Rooij, Rene Daendliker

OE, Vol. 40, Issue 05, (May 2001) https://doi.org/10.1117/12.10.1117/1.1359522

KEYWORDS: Microlens, Luminescence, Molecules, Glasses, Fluorescence spectroscopy, Sensors, Spherical lenses, Photoresist materials, Semiconducting wafers, Microfabrication

Proceedings Article | 20 October 2000 Paper

Paper

4x4 nonblocking matrix switch based on MOEMS

Laurent Dellmann, Cornel Marxer, Nico de Rooij

Proceedings Volume 4230, (2000) https://doi.org/10.1117/12.404900

KEYWORDS: Switches, Mirrors, Switching, Fusion splicing, Microopto electromechanical systems, Actuators, Microtechnology, Optical fibers, Plasma etching, Plasma

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Proceedings Article | 25 August 2000 Paper

Paper

Microsystems for diverse applications using recently developed microfabrication techniques

Laurent Dellmann, Terunobu Akiyama, Danick Briand, Sebastien Gautsch, Olivier Guenat, Benedikt Guldimann, Philippe Luginbuhl, Cornel Marxer, Urs Staufer, Bart van der Schoot, Nico de Rooij

Proceedings Volume 4174, (2000) https://doi.org/10.1117/12.396435

KEYWORDS: Microsystems, Microfabrication

Proceedings Article | 22 August 2000 Paper

Paper

Microsystems for diverse applications using recently developed microfabrication techniques

Laurent Dellmann, Terunobu Akiyama, Danick Briand, Sebastien Gautsch, Olivier Guenat, Benedikt Guldimann, Philippe Luginbuhl, Cornel Marxer, Urs Staufer, Bart van der Schoot, Nico de Rooij

Proceedings Volume 4178, (2000) https://doi.org/10.1117/12.396492

KEYWORDS: Silicon, Actuators, Sensors, Field effect transistors, Gas sensors, Microfabrication, Atomic force microscopy, Switches, Microsystems, Semiconducting wafers

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Proceedings Article | 22 August 2000 Paper

Paper

New design for an integrated Fourier transform spectrometer

Omar Manzardo, Hans Peter Herzig, Benedikt Guldimann, Cornel Marxer, Nico de Rooij

Proceedings Volume 4178, (2000) https://doi.org/10.1117/12.396502

KEYWORDS: Mirrors, Fourier transforms, Spectroscopy, Sensors, Collimation, Modulation, Silicon, Actuators, Beam splitters, Optical components

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Proceedings Article | 18 August 2000 Paper

Paper

Microsystems for diverse applications using recently developed microfabrication techniques

Laurent Dellmann, Terunobu Akiyama, Danick Briand, Sebastien Gautsch, Olivier Guenat, Benedikt Guldimann, Philippe Luginbuhl, Cornel Marxer, Urs Staufer, Bart van der Schoot, Nico de Rooij

Proceedings Volume 4177, (2000) https://doi.org/10.1117/12.395658

KEYWORDS: Microsystems, Microfabrication, Nanotechnology, Nanofabrication, Microfluidics, Photoresist developing, Process control, Environmental monitoring, Medicine, Aerospace engineering

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Proceedings Article | 18 August 2000 Paper

Paper

Microsystems for diverse applications using recently developed microfabrication techniques

Laurent Dellmann, Terunobu Akiyama, Danick Briand, Sebastien Gautsch, Olivier Guenat, Benedikt Guldimann, Philippe Luginbuhl, Cornel Marxer, Urs Staufer, Bart van der Schoot, Nico de Rooij

Proceedings Volume 4179, (2000) https://doi.org/10.1117/12.395691

KEYWORDS: Silicon, Actuators, Sensors, Field effect transistors, Gas sensors, Microfabrication, Atomic force microscopy, Deep reactive ion etching, Switches, Microsystems

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Proceedings Article | 15 August 2000 Paper

Paper

Microsystems for diverse applications using recently developed microfabrication techniques

Laurent Dellmann, Terunobu Akiyama, Danick Briand, Sebastien Gautsch, Olivier Guenat, Benedikt Guldimann, Philippe Luginbuhl, Cornel Marxer, Urs Staufer, Bart van der Schoot, Nico de Rooij

Proceedings Volume 4176, (2000) https://doi.org/10.1117/12.395631

KEYWORDS: Silicon, Actuators, Sensors, Field effect transistors, Gas sensors, Microfabrication, Atomic force microscopy, Switches, Microsystems, Semiconducting wafers

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Proceedings Article | 11 August 2000 Paper

Paper

Microsystems for diverse applications using recently developed microfabrication techniques

Laurent Dellmann, Terunobu Akiyama, Danick Briand, Sebastien Gautsch, Olivier Guenat, Benedikt Guldimann, Philippe Luginbuhl, Cornel Marxer, Urs Staufer, Bart van der Schoot, Nico de Rooij

Proceedings Volume 4175, (2000) https://doi.org/10.1117/12.395608

KEYWORDS: Silicon, Actuators, Sensors, Field effect transistors, Gas sensors, Microfabrication, Deep reactive ion etching, Semiconducting wafers, Atomic force microscopy, Switches

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Proceedings Article | 10 August 2000 Paper

Paper

Microsystems for diverse applications using recently developed microfabrication techniques

Laurent Dellmann, Terunobu Akiyama, Danick Briand, Sebastien Gautsch, Olivier Guenat, Benedikt Guldimann, Philippe Luginbuhl, Cornel Marxer, Urs Staufer, Bart van der Schoot, Nico de Rooij

Proceedings Volume 4180, (2000) https://doi.org/10.1117/12.395706

KEYWORDS: Silicon, Actuators, Sensors, Field effect transistors, Gas sensors, Microfabrication, Deep reactive ion etching, Semiconducting wafers, Atomic force microscopy, Microsystems

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Proceedings Article | 2 September 1999 Paper

Paper

Miniaturized time-scanning Fourier Transform Spectrometer based on silicon technology

Omar Manzardo, Hans Peter Herzig, Cornel Marxer, Nico de Rooij

Proceedings Volume 3878, (1999) https://doi.org/10.1117/12.361276

KEYWORDS: Mirrors, Fourier transforms, Actuators, Spectroscopy, Silicon, Michelson interferometers, Modulation, Fourier spectroscopy, Beam splitters, Helium neon lasers

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Proceedings Article | 19 August 1999 Paper

Paper

Controlled liquid dosing in microinstruments

Marc Boillat, Bart van der Schoot, Philippe Arquint, Nico de Rooij

Proceedings Volume 3877, (1999) https://doi.org/10.1117/12.359348

KEYWORDS: Sensors, Liquids, Microfluidics, Temperature metrology, Microfabrication, Silicon, Control systems, Ceramics, Semiconducting wafers, Electronics

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SPIE Journal Paper | 1 April 1999

Pulsed fiber laser using micro-electro-mechanical mirrors

Yves-Alain Peter, Hans Peter Herzig, Etienne Rochat, Rene Daendliker, Cornel Marxer, Nico de Rooij

OE, Vol. 38, Issue 04, (April 1999) https://doi.org/10.1117/12.10.1117/1.602107

KEYWORDS: Mirrors, Micromirrors, Pulsed fiber lasers, Fiber lasers, Switching, Modulation, Reflectivity, Scanning electron microscopy, Optical simulations, Modulators

Proceedings Article | 18 December 1998 Paper

Paper

Microfabricated voltammetric sensors for trace metal analysis

Giovanni Fiaccabrino, Peter van der Wal, Nico de Rooij, Milena Koudelka-Hep, Marylou Tercier, Cecile Belmont-Hebert, Jacques Buffle, Fabio Confalonieri, Guiliano Riccardi, Flavio Graziotin

Proceedings Volume 3539, (1998) https://doi.org/10.1117/12.333744

KEYWORDS: Sensors, Metals, Mercury, Microfabrication, Electrodes, Profiling, Diffusion, Thin films, In situ metrology, Reliability

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Proceedings Article | 5 September 1997 Paper

Paper

Microfabrication technologies for microsystems

Nico de Rooij

Proceedings Volume 3223, (1997) https://doi.org/10.1117/12.284466

KEYWORDS: Microsystems, Microfabrication, Micromachining, Photonics, Fabrication, Integrated circuits

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Proceedings Article | 31 March 1997 Paper

Paper

Acoustic wave device for the translation of microparticles

Philippe Luginbuhl, Nico de Rooij, Scott Collins, Georges-Andre Racine, Nava Setter, K. Brooks

Proceedings Volume 2978, (1997) https://doi.org/10.1117/12.269963

KEYWORDS: Acoustics, Wave plates, Ferroelectric materials, Silicon, Composites, Platinum, Thin films, Etching, Glasses, Thin film devices

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Showing 5 of 58 publications

Conference Committee Involvement (11)

Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV

10 December 2008 | Melbourne, Australia

Smart Sensors, Actuators and MEMS

2 May 2007 | Maspalomas, Gran Canaria, Spain

Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III

11 December 2006 | Adelaide, Australia

Nanomaterial Synthesis and Integration for Sensors, Electronics, Photonics, and Electro-Optics

1 October 2006 | Boston, Massachusetts, United States

Device and Process Technologies for Microelectronics, MEMS, and Photonics IV

12 December 2005 | Brisbane, Australia

Showing 5 of 11 Conference Committees

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