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Niels Claessens
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Publications (1)
Proceedings Article | 22 February 2021 Presentation + Paper
Spectroscopy: a new route towards critical-dimension metrology of the cavity etch of nanosheet transistors
J. Bogdanowicz, Y. Oniki, K. Kenis, Y. Muraki, T. Nuytten, S. Sergeant, A. Franquet, V. Spampinato, T. Conard, I. Hoflijk, J. Meersschaut, N. Claessens, A. Moussa, D. Van Den Heuvel, J. Hung, R. Koret, A.-L. Charley, P. Leray
Proceedings Volume 11611, 116111Q (2021) https://doi.org/10.1117/12.2581800
KEYWORDS: Etching, Metrology, Transistors, Spectroscopes, Raman spectroscopy, Critical dimension metrology, Spectroscopy, Photoemission spectroscopy, X-rays, Scanning electron microscopy
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