Mr. Oren Zoran Profile

Oren Zoran

Physicist at Applied Materials

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Publications (2)

Proceedings Article | 27 January 2005 Paper

Verification of height and sidewall angle SEM metrology accuracy using Monte Carlo simulation

Roman Kris, Ofer Adan, Aviram Tam, Albert Karabekov, Ovadya Menadeva, Ram Peltinov, Oren Zoran, Nadav Wertsman, Arcadiy Vilenkin

Proceedings Volume 5645, (2005) https://doi.org/10.1117/12.575390

KEYWORDS: 3D metrology, Scanning electron microscopy, Monte Carlo methods, 3D modeling, Metrology, Optical lithography, Gallium, Semiconductors, Tolerancing

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Proceedings Article | 24 May 2004 Paper

Height and sidewall angle SEM metrology accuracy

Roman Kris, Ofer Adan, Aviram Tam, Albert Karabekov, Ovadya Menadeva, Ram Peltinov, Ayelet Pnueli, Oren Zoran, Arcadiy Vilenkin

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.537938

KEYWORDS: Scanning electron microscopy, Metrology, 3D metrology, Inspection, Process control, Optical lithography, Silver, Semiconductors, Monte Carlo methods, 3D modeling

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