Dr. Patrick Lambelet Profile

Dr. Patrick Lambelet

CTO at Heliotis AG

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Author

Area of Expertise:

Optics , Optical Coherence Tomography , Interferometry

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Company Website

Publications (12)

Proceedings Article | 13 May 2013 Paper

Scanning fringe projection for fast 3D inspection

Marc Honegger, Michael Kahl, Sandra Trunz, Stefan Rinner, Andreas Ettemeyer, Patrick Lambelet

Proceedings Volume 8788, 878814 (2013) https://doi.org/10.1117/12.2020260

KEYWORDS: Cameras, Projection systems, Light emitting diodes, Image acquisition, 3D metrology, Inspection, Content addressable memory, Calibration, Imaging systems, Semiconducting wafers

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In an earlier paper we have described a concept for high speed 3D inspection using fringe projection techniques. We use a special CMOS camera with 300 x 300 px which can calculate the phase on board. The focus of the first step of development had been a fringe projector, which was able to modulate the projected fringes with up to 250 kHz. In the second step the image acquisition part of the system was developed. In case of 3D measurement with a matrix camera, the camera resp. the measuring object has to be moved stepwise in the lateral direction to cover multiple acquisition areas of the measurement object. Between each image the lateral movement has to correspond to the field of view of the camera. At the intended very high image acquisition rates the high acceleration of the system between each image will lead to inacceptable mechanical forces. In order to obtain a continuous scanning procedure and at the same time to use the performance of a matrix camera, a special lens system was developed. A measurement field 120 mm long and 3 mm wide is imaged onto the camera. The width of the measuring field is imaged onto the 300 rows of the camera, giving a lateral resolution of 10 μm. In the longitudinal direction the 120 mm object length is divided into 12’000 lines to reach the same resolution of 10 μm. Due to technical reasons that will be described later only 240 of the 300 pixel rows on the chip were used. Consequently, with each camera shot 240 separated lines are imaged onto the chip. Between each of these 240 lines there is a large empty space, which is not imaged by the camera. In principle, the camera is operating as 240 single line cameras. Therefore, if the camera is shifted in an inclined direction to the camera orientation over the object, the empty spaces can be recorded as well. In an optimum alignment, the complete measuring object can be scanned in a continuous movement, covering the total length of 120 mm. In this paper we will describe this image acquisition system and give first measuring results.

Proceedings Article | 13 May 2013 Paper

Fast and accurate line scanner based on white light interferometry

Patrick Lambelet, Rudolf Moosburger

Proceedings Volume 8788, 87880Q (2013) https://doi.org/10.1117/12.2020617

KEYWORDS: Cameras, Optical interferometry, Inspection, Mirrors, Interferometry, Demodulation, Interferometers, Scanners, Data acquisition, Near field optics

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White-light interferometry is a highly accurate technology for 3D measurements. The principle is widely utilized in surface metrology instruments but rarely adopted for in-line inspection systems. The main challenges for rolling out inspection systems based on white-light interferometry to the production floor are its sensitivity to environmental vibrations and relatively long measurement times: a large quantity of data needs to be acquired and processed in order to obtain a single topographic measurement. Heliotis developed a smart-pixel CMOS camera (lock-in camera) which is specially suited for white-light interferometry. The demodulation of the interference signal is treated at the level of the pixel which typically reduces the acquisition data by one orders of magnitude. Along with the high bandwidth of the dedicated lock-in camera, vertical scan-speeds of more than 40mm/s are reachable. The high scan speed allows for the realization of inspection systems that are rugged against external vibrations as present on the production floor. For many industrial applications such as the inspection of wafer-bumps, surface of mechanical parts and solar-panel, large areas need to be measured. In this case either the instrument or the sample are displaced laterally and several measurements are stitched together. The cycle time of such a system is mostly limited by the stepping time for multiple lateral displacements. A line-scanner based on white light interferometry would eliminate most of the stepping time while maintaining robustness and accuracy. A. Olszak proposed a simple geometry to realize such a lateral scanning interferometer. We demonstrate that such inclined interferometers can benefit significantly from the fast in-pixel demodulation capabilities of the lock-in camera. One drawback of an inclined observation perspective is that its application is limited to objects with scattering surfaces. We therefore propose an alternate geometry where the incident light is normal to the object surface and where an inclined grating is used as reference mirror.

Proceedings Article | 3 November 2011 Paper

Parallel approach to MEMS and micro-optics interferometric testing

M. Kujawińska, S. Beer, K. Gastinger, C. Gorecki, K. Haugholt, M. Józwik, P. Lambelet, R. Paris, A. Styk, U. Zeitner

Proceedings Volume 8011, 80117O (2011) https://doi.org/10.1117/12.903256

KEYWORDS: Semiconducting wafers, Interferometers, Inspection, Diffractive optical elements, Wafer-level optics, Imaging systems, Interferometry, Lithium, Microelectromechanical systems, Micro optics

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Proceedings Article | 27 May 2011 Paper

High speed fringe projection for fast 3D inspection

Sandra Caspar, Marc Honegger, Stefan Rinner, Patrick Lambelet, Carlo Bach, Andreas Ettemeyer

Proceedings Volume 8082, 80820Y (2011) https://doi.org/10.1117/12.888930

KEYWORDS: Cameras, Inspection, Light emitting diodes, Modulation, Phase shifts, Image acquisition, Fringe analysis, Projection systems, 3D metrology, Imaging systems

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Proceedings Article | 27 May 2011 Paper

Parallel optical coherence tomography (pOCT) for industrial 3D inspection

Patrick Lambelet

Proceedings Volume 8082, 80820X (2011) https://doi.org/10.1117/12.889390

KEYWORDS: Optical coherence tomography, Interferometers, Cameras, Inspection, 3D metrology, 3D vision, CMOS cameras, Solar cells, Modulation, Sensors

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Proceedings Article | 14 September 2010 Paper

Smart pixel camera based signal processing in an interferometric test station for massive parallel inspection of MEMS and MOEMS

Adam Styk, Patrick Lambelet, Arne Røyset, Małgorzata Kujawińska, Kay Gastinger

Proceedings Volume 7387, 73870M (2010) https://doi.org/10.1117/12.871522

KEYWORDS: Cameras, Demodulation, Interferometers, Interferometry, Imaging systems, Inspection, Signal detection, Signal processing, Data processing, Modulation

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Proceedings Article | 14 May 2010 Paper

Next-generation test equipment for micro-production

Kay Gastinger, Lars Johnsen, Malgorzata Kujawinska, Michal Jozwik, Uwe Zeitner, Peter Dannberg, Jorge Albero, Sylwester Bargiel, Christoph Schaeffel, Stephan Beer, Rudolf Moosburger, Patrick Lambelet, Marco Pizzi

Proceedings Volume 7718, 77180F (2010) https://doi.org/10.1117/12.855087

KEYWORDS: Semiconducting wafers, Interferometers, Inspection, Imaging systems, Cameras, Mirrors, Lithium, Glasses, Wafer-level optics, Diffraction gratings

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Proceedings Article | 13 April 2005 Paper

A semi-analytical model accounting for multiple scattering in optical coherence tomography

Boris Karamata, Patrick Lambelet, Marcel Leutenegger, Markus Laubscher, Stephane Bourquin, Theo Lasser

Proceedings Volume 5690, (2005) https://doi.org/10.1117/12.590237

KEYWORDS: Optical coherence tomography, Mirrors, Multiple scattering, Light scattering, Sensors, Scattering, Motion models, Statistical modeling, Monte Carlo methods, Signal detection

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Proceedings Article | 1 July 2004 Paper

Light sources for optical cross-talk suppression in wide-field optical coherence tomography

Boris Karamata, Markus Laubscher, Patrick Lambelet, Tiemo Anhut, Theo Lasser

Proceedings Volume 5316, (2004) https://doi.org/10.1117/12.530337

KEYWORDS: Optical coherence tomography, Light sources, Scattering, Light scattering, Spatial coherence, Sensors, Mirrors, Interferometers, Speckle pattern, Mercury

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Proceedings Article | 15 January 1999 Paper

Photoimmobilization of biomolecules with a scanning near-field optical microscope: functionalization and detection at the submicrometer scale

Claude Philipona, Patrick Lambelet, Luciana Vaccaro, Fabienne Marquis-Weible, Hans Sigrist

Proceedings Volume 3570, (1999) https://doi.org/10.1117/12.336937

KEYWORDS: Near field scanning optical microscopy, Near field, Optical microscopes, Proteins, Luminescence, Microscopy, Glasses, Biosensors, Spatial resolution, Transducers

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Proceedings Article | 29 December 1997 Paper

Near-field optical microscopy for subwavelength investigation of biological structures

Fabienne Marquis-Weible, Claude Philipona, Patrick Lambelet, Abdeljlail Sayah, Michael Pfeffer

Proceedings Volume 3197, (1997) https://doi.org/10.1117/12.297979

KEYWORDS: Near field scanning optical microscopy, Near field, Near field optics, Molecules, Luminescence, Optical microscopy, Glasses, Nanoprobes, Image resolution, Chromium

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Proceedings Article | 22 December 1993 Paper

Optical low-coherence reflectometry of efficient Bragg gratings in optical fiber

Hans Limberger, Pierre-Yves Fonjallaz, Patrick Lambelet, Rene-Paul Salathe, Christophe Zimmer, H. Gilgen

Proceedings Volume 2044, (1993) https://doi.org/10.1117/12.165670

KEYWORDS: Optical fibers, Reflectivity, Fiber Bragg gratings, Reflectometry, Mirrors, Germanium, Modulation, Standards development, Telecommunications, Light emitting diodes

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Showing 5 of 12 publications

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