Mr. Paul Turner Profile

Paul Turner

at Veeco Instruments Inc

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Author

Publications (4)

Proceedings Article | 12 October 2021 Presentation + Paper

Comparison of deposition techniques for Mo/Si reflective multilayers for EUV mask blanks

Katrina Rook, Antonio Checco, Paul Turner, Ashish Kulkarni, Kenji Yamamoto, Meng Lee

Proceedings Volume 11854, 1185415 (2021) https://doi.org/10.1117/12.2600972

KEYWORDS: Reflectivity, Multilayers, Molybdenum, Silicon, Extreme ultraviolet, Sputter deposition, Ion beams, Ions, Contamination, Argon

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SPIE Journal Paper | 17 June 2021

Optimization of ion-beam-deposited Mo/Si multilayers for extreme ultraviolet masks

Katrina Rook, Paul Turner, Narasimhan Srinivasan, Kenji Yamamoto, Tania Henry, Meng Lee

JM3, Vol. 20, Issue 02, 021008, (June 2021) https://doi.org/10.1117/12.10.1117/1.JMM.20.2.021008

KEYWORDS: Reflectivity, Transmission electron microscopy, Molybdenum, Silicon, Extreme ultraviolet, Ion beams, Interfaces, Multilayers, Chemical species, Ions

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Proceedings Article | 15 October 2020 Presentation + Paper

Process optimization for performance improvement in Mo/Si multilayers for EUV mask blanks

Katrina Rook, Paul Turner, Narasimhan Srinivasan, Tania Henry, Kenji Yamamoto, Meng Lee

Proceedings Volume 11517, 1151708 (2020) https://doi.org/10.1117/12.2573164

KEYWORDS: Extreme ultraviolet, Multilayers, Reflectivity, Molybdenum, Silicon, Mirrors, Ion beams, X-rays, Spectroscopy, Transmission electron microscopy

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Proceedings Article | 26 September 2019 Paper

Interfacial quality of high-reflectivity Mo-Si multilayers for EUV mask blanks

Narasimhan Srinivasan, Katrina Rook, Paul Turner, Tania Henry, Kenji Yamamoto, Devlin Donnelly, Thu Van Nguyen, Vincent Ip, Meng Lee, Sandeep Kohli, Frank Cerio, Adrian Devahasayam

Proceedings Volume 11147, 111470N (2019) https://doi.org/10.1117/12.2536935

KEYWORDS: Silicon, Molybdenum, Multilayers, Extreme ultraviolet, Atomic force microscopy, Photomasks, Surface roughness, Ion beams, Reflectivity, Interfaces

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