Dr. Peng Feng Profile

Dr. Peng Feng

at Shanghai Institute of Optics & Fine Mechanics CAS

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Author

Publications (2)

Proceedings Article | 24 November 2023 Paper

Simulation analysis of thermally induced deformation on reticle for deep ultraviolet lithography

Yisha Cao, Yunjun Lu, Peng Feng, Rong Su, Xiangzhao Wang

Proceedings Volume 12935, 1293559 (2023) https://doi.org/10.1117/12.3008409

KEYWORDS: Reticles, Thermal deformation, Deformation, Light sources, Lithography, Optical gratings, Light sources and illumination, Deep ultraviolet, Integrating spheres, Glasses

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SPIE Journal Paper | 14 December 2021

Measurement of the magnification and distortion of high-precision imaging system using dual-fiber point diffraction interferometer

Yisha Cao, Feng Tang, Xiangzhao Wang, Yang Liu, Peng Feng, Yunjun Lu, Fudong Guo

OE, Vol. 60, Issue 12, 124107, (December 2021) https://doi.org/10.1117/12.10.1117/1.OE.60.12.124107

KEYWORDS: Distortion, Imaging systems, Reticles, Error analysis, Diffraction, Optical fibers, Wavefront aberrations, Point diffraction interferometers, Optical engineering, Nickel

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