Mr. Qi Cheng Profile

Qi Cheng

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Publications (1)

Proceedings Article | 22 February 2021 Presentation + Paper

Novel methods for stitching and overlay corrections

Haifeng Pu, Ningqi Zhu, Shengyuan Zhong, Jason Pei, Chin-Chou K. Huang, Qi Cheng, Lifeng Tong, Chuanlong Wang, Jian Wang, Hongbo He

Proceedings Volume 11611, 116111I (2021) https://doi.org/10.1117/12.2583787

KEYWORDS: Overlay metrology, Process control, Metrology, CMOS sensors, Semiconductor process technologies, Reticles, Optical parametric oscillators, Optical lithography, Optical alignment, Lithography

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