Dr. Qianbo Lu Profile

Dr. Qianbo Lu

at Zhejiang Univ

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Author

Publications (6)

Proceedings Article | 12 December 2018 Paper

Optical design and analysis of a high resolution MOEMS accelerometer based on diffraction grating

Yuan Yao, Debin Pan, Anbing Geng, Haitao Wang, Jian Bai, Qianbo Lu, Peiwen Chen, Weidong Fang

Proceedings Volume 10848, 108480G (2018) https://doi.org/10.1117/12.2505677

KEYWORDS: Diffraction gratings, Microopto electromechanical systems, Optical design, Mirrors, Sensors, Structural sensing, Optical resonators, Interferometry, Mechanical sensors, Modal analysis

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Proceedings Article | 5 November 2018 Paper

Thermal stress of MOEMS accelerometers based on grating interferometric cavity

Weidong Fang, Qianbo Lu, Jian Bai, Dandan Han, Peiwen Chen

Proceedings Volume 10815, 108151H (2018) https://doi.org/10.1117/12.2502273

KEYWORDS: Adhesives, Microopto electromechanical systems, Interferometry, Finite element methods, Silicon, Packaging, Thermal effects, Microelectromechanical systems, Thermal modeling, Sensors

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Proceedings Article | 25 October 2016 Paper

Analysis and amelioration about the cross-sensitivity of a high resolution MOEMS accelerometer based on diffraction grating

Qianbo Lu, Jian Bai, Kaiwei Wang, Shuqi Lou, Xufen Jiao, Dandan Han

Proceedings Volume 9685, 968504 (2016) https://doi.org/10.1117/12.2241339

KEYWORDS: Microopto electromechanical systems, Diffraction gratings, Sensors, Mechanical sensors, Diffraction, Structural sensing, Finite element methods, Silicon, Semiconducting wafers, Etching

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Proceedings Article | 28 August 2016 Presentation + Paper

Mechanical design optimization of a single-axis MOEMS accelerometer based on a grating interferometry cavity for ultrahigh sensitivity

Qianbo Lu, Jian Bai, Kaiwei Wang, Shuqi Lou, Xufen Jiao, Dandan Han, Guoguang Yang

Proceedings Volume 9960, 99600W (2016) https://doi.org/10.1117/12.2235409

KEYWORDS: Microopto electromechanical systems, Interferometry, Mechanical engineering, Mechanical sensors, Optical design, Finite element methods, Mechanical engineering, Mirrors, Silicon, 3D modeling, Lanthanum

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Proceedings Article | 28 August 2016 Presentation + Paper

The analysis of temperature effect and temperature compensation of MOEMS accelerometer based on a grating interferometric cavity

Dandan Han, Jian Bai, Qianbo Lu, Shuqi Lou, Xufen Jiao, Guoguang Yang

Proceedings Volume 9960, 99600X (2016) https://doi.org/10.1117/12.2236584

KEYWORDS: Interferometry, Finite element methods, Performance modeling, Microopto electromechanical systems, Quantitative analysis, Modulation, Mechanical sensors, Temperature metrology, Microelectromechanical systems, Diffraction gratings

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Proceedings Article | 7 August 2015 Paper

Detection of defects in optics based on scanning

Bin Zhou, Jian Bai, Yiyong Liang, Kaiwei Wang, Qianbo Lu, Sai Zhang

Proceedings Volume 9623, 96231F (2015) https://doi.org/10.1117/12.2193745

KEYWORDS: Glasses, Microscopes, Defect detection, Optical components, CCD cameras, Error analysis, 3D image processing, Image processing, Laser optics, Light scattering

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Showing 5 of 6 publications

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