Prof. Qiang Yuan Profile

Prof. Qiang Yuan

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Proceedings Article | 23 December 2023 Paper

Elucidating the surface damage behavior of sol-gel silica anti-reflective films during low-pressure plasma cleaning

Yuhai Li, Xujie Liu, Yilan Jiang, Guorui Zhou, Qiang Yuan, Xiaodong Yuan, Fang Wang, Laixi Sun, Lihua Lu, Peng Zhang, Qingshun Bai

Proceedings Volume 12982, 129820C (2023) https://doi.org/10.1117/12.3014859

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Plasma has been widely used in the in situ removal of organic contaminants on the surface of large aperture optical components by physical bombardment and chemical reaction. Since the plasma is usually generated by ionizing gas through the electric field, the charged reactive species are accelerated to bombard the surface when passing through the surface sheath. After the organic contaminants on the surface of the optical components are completely removed, the surface film of the optical components may be eroded by long-time plasma irradiation. Therefore, the surface damage characteristics induced by plasma cleaning on optical components were studied to apply the technology of plasma in situ cleaning in the inertial confinement fusion facilities. Firstly, the effect of the amount of organic contaminants on the performance of optical components was investigated. Then, the influence of plasma cleaning time on the transmittance and wavelength peak of fused quartz optical components coated with sol-gel anti-reflection film was analyzed. The plasma cleaning experiments illustrated that the film thickness had a damage accumulation effect after the long plasma irradiation, and the surface pores gradually increased. The surface damage mechanism of plasma action was discussed. Finally, the research on the surface damage mechanism of sol-gel anti-reflective film during plasma cleaning lays a foundation for the realization of nondestructive in situ cleaning of optical components.

Proceedings Article | 22 December 2023 Paper

Analysis of grating surface organic contamination in chirped pulse amplification system

Yuhai Li, Bin Zhu, Gang Li, Na Xie, Kainan Zhou, Qiang Yuan, Xiaodong Yuan, Fang Wang, Laixi Sun, Lihua Lu, Peng Zhang, Qingshun Bai

Proceedings Volume 12974, 1297402 (2023) https://doi.org/10.1117/12.3013651

KEYWORDS: Contamination, Optical gratings, Gold, Diffraction gratings, Natural surfaces, Optical components, Laser irradiation, Molecules, Diffraction, Vacuum

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The surface of the gold film grating appeared to different degrees of carbon burning phenomenon under high energy laser irradiation, which resulted in the degradation of the grating performance. Thus, in this study, the main components and relative contents of organic contaminants in the wall and air at different positions in the chirped pulse amplification system were detected by gas chromatography and mass spectrometry. The organic molecules were volatilized from potential sources such as components and pump oil or dust produced by stray light irradiation of carbon-based materials. The contaminant C₁₂H₃₈O₅Si₆ was found at multiple sampling sites, indicating that the hydrocarbon molecules in the contaminant formed a chemical bond with the molecular structure of silicon and oxygen on the surface of the optical component. Compared to physical adsorption, this chemical bond adsorption is stronger and more difficult to remove. The effect of long-term vacuum organic contamination on the diffraction efficiency of the gold grating was not significant enough. On the contrary, organic residual contaminants were formed in the laser-irradiated area of the surface of the gold grating, and the diffraction efficiency was significantly reduced to two-thirds of the undamaged area. Many small organic molecules, particles and water molecules were deposited in the grooves on the surface of the gold grating, and carbonization occurs under the action of ultra-short pulse laser. A stress pit appeared in the center area of laser irradiation, causing damage to the surface of the grating.

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