In this paper, a single element integrated infrared detector using screen printed lead zirconate titanate (PZT) thick
films on Pt/Ti/Al2O3/SiO2 coated silicon cup has been developed. The thermal insulating micro-bridge of the detector
was prepared by Micro-electro-mechanical System (MEMS) technology. To increase the density of PZT ceramic thick
films, cool isostatic pressing experiments had been conducted under 300MPa and 30s dwell time. The XRD pattern
shows that PZT thick films possess good perovskite structure. The SEM cross section image demonstrate that the PZT
film was dense and the thickness is about 25μm. The dielectric constant, loss and pyroelectric coefficient of PZT thick
films prepared at optimized conditions is 1100, 1% and 1×10-8C/Kcm 2, respectively. The results indicated that the PZT
thermal sensitive layer fabricated by screen printing on the Pt/Ti coated silicon cup with micro-bridge thermal insulation
structure, and Al2O3/SiO2 barrier layer show potential application in infrared detectors.
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