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Prof. Qikun Xue
at Institute of Physics
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Publications (1)
Proceedings Article | 12 April 2005 Paper
Micro/nano grating and its application to moiré measurement
Huimin Xie, Zhanwei Liu, Haixia Shang, Qikun Xue, Jinfeng Jia, Daining Fang
Proceedings Volume 5852, (2005) https://doi.org/10.1117/12.621896
KEYWORDS: Lithography, Aluminum, Scanning probe microscopy, Fabrication, Metals, Molecular beam epitaxy, Crystals, Scanning tunneling microscopy, Nanolithography, Atomic force microscopy
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