Large-scale optical components is being applied more and more widely in the astronomical optics, space optics, groundbased
space target detection and identification, laser propagation in the atmosphere, inertial confinement fusion (ICF)
and other fields, especially the large-scale aspherical optical component is one of key parts which play a supportive role
in those fields. Large-scale optical components surface measurement instrument and technique has become a research
focus of many scholars in recent years. In this paper introduced a compound interferometer system, which based on the
principle of traditional Fizeau interferometer and lateral shear interferometer. In this system, produces two probe light
beams by a He-Ne laser, one of probe light beams is used to measure flat optical surface by using comparison with the
reference wavefront, and the other probe light beam is used to measure spherical and aspherical optical surface according
to the principle of lateral shear interferometer and without using reference wavefront. Discussed in detail optical layout
of the system as well as the principle of surface measurement, and the preliminary test results were given. The compound
interferometer system has a compact, multi-function, and good anti-vibration performance can be used for large-scale
optical plane (diameter less than 320mm), spherical and aspherical optical components surface measurement. Due to the
information that lateral shear interferogram carries does not show directly the deviation between the wavefront under test
and the ideal wavefront, but the wavefront difference, so the wavefront reconstruction method is more complex, and the
wavefront reconstruction algorithm from lateral shearing interferograms is also analyzed and discussed.
The light beam wave front form is often base to complete accurate parameter calculations of such objects under test as
optical systems and components, transparent and reflecting materials, man-made radiation souses and so on. The
adequacy of measured data to reconstruct wave front form and technical practicability of various optical measuring
systems are analyzed to determine applicability of such methods and devices as Hartmann Method, Wavefront Sensing
by Pseudo Phase-Conjugate Interferometry, Talbot Method, Phase Modulation Method, Linnik Interferometer and
Shearing Interferometry. Information losses of wave front spatial frequency spectrum are determined on mention
methods and optical systems. Experimental data and end-use measurements are submitted.
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