Ms. Raluca F. Popescu Profile

Raluca F. Popescu

Retired

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Publications (1)

Proceedings Article | 13 March 2012 Paper

Finite element models of lithographic mask topography

Jacek Tyminski, Raluca Popescu, Sven Burger, Jan Pomplun, Lin Zschiedrich, Tomoyuki Matsuyama, Tomoya Noda

Proceedings Volume 8326, 83261B (2012) https://doi.org/10.1117/12.916957

KEYWORDS: Finite element methods, Photomasks, Near field, Fiber optic illuminators, Scanners, Stanford Linear Collider, Image acquisition, Lithography, Semiconducting wafers, Computer simulations

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