Dr. Rémy Gassilloud Profile

Dr. Rémy Gassilloud

at CEA-LETI

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Publications (1)

Proceedings Article | 22 February 2021 Presentation

Selective patterning using deposition and etch: case of area selective deposition

christophe vallee, Marceline Bonvalot, Taguhi Yeghoyan, Moustapha Jaffal, Nicolas Posseme, Remy Gassilloud, Thierry Chevolleau

Proceedings Volume 11615, 116150C (2021) https://doi.org/10.1117/12.2582079

KEYWORDS: Etching, Optical lithography, Deposition processes, Atomic layer deposition, Reactive ion etching, Plasma etching, Roads, Anisotropic etching, Wet etching, Transistors

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