Dr. Robert D. Grejda Profile

Dr. Robert D. Grejda

Precision Engineer at Corning Tropel Corp

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Publications (3)

Proceedings Article | 21 June 2019 Paper

Polarization metrology for high numerical aperture DUV objectives

Robert Grejda, Paul Michaloski, Duncan Spaulding, Stephen Mack, Robert Michaels, Paul Dewa, David Aronstein

Proceedings Volume 11057, 110570P (2019) https://doi.org/10.1117/12.2525606

KEYWORDS: Polarization, Polarimetry, Objectives, Birefringence, Deep ultraviolet, Crystals, Sensors, Nanolithography, Thin film coatings, Silica

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Proceedings Article | 28 May 2018 Paper

Functional tolerancing using full surface metrology

Robert Grejda, Katherine Ballman, Chris Lee

Proceedings Volume 10695, 106950G (2018) https://doi.org/10.1117/12.2312199

KEYWORDS: Tolerancing, Reticles, Optical components, Photomasks, Manufacturing, Scanners, Metrology, Error analysis, Polishing, Interferometry, Precision lens assemblies, Optomechanical components

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Proceedings Article | 23 August 2017 Paper

Advancements in adhesive mounting of optics

Brian McMaster, Robert Grejda, Paul Dewa

Proceedings Volume 10371, 1037103 (2017) https://doi.org/10.1117/12.2275977

KEYWORDS: Adhesives, Optical mounts, Ultraviolet radiation, Contamination, Lenses

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