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Robert Newcomb
VP Business Development at Filmetrics Inc
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Author
Publications (3)
Proceedings Article | 24 March 2006 Paper
Modeling of substrate current measurement and charge transfer in insulators
Proceedings Volume 6152, 615230 (2006) https://doi.org/10.1117/12.656491
KEYWORDS: Electrons, Interfaces, Monte Carlo methods, Dielectrics, Thin films, Image processing, Oxides, Device simulation, Semiconductors, Scattering
Proceedings Article | 15 July 2003 Paper
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Keizo Yamada, Takeo Ushiki, Yousuke Itagaki, Robert Newcomb
Proceedings Volume 5041, (2003) https://doi.org/10.1117/12.485238
KEYWORDS: Semiconducting wafers, Process control, Silicon, Silica, Electron beams, Yield improvement, Etching, Scanning electron microscopy, Semiconductors, Manufacturing
Proceedings Article | 2 June 2003 Paper
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Keizo Yamada, Takeo Ushiki, Yousuke Itagaki, Robert Newcomb
Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.485028
KEYWORDS: Semiconducting wafers, Process control, Silicon, Silica, Electron beams, Yield improvement, Etching, Scanning electron microscopy, Semiconductors, Control systems
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