Dr. Roland Thielsch Profile

Dr. Roland Thielsch

at Southwall Europe GmbH

SPIE Involvement:

Author

Publications (30)

Proceedings Article | 5 October 2005 Paper

Lanthanide tri-fluorides: a survey of the optical, mechanical and structural properties of thin films with emphasis of their use in the DUV– VUV–spectral range

H. Uhlig, R. Thielsch, J. Heber, N. Kaiser

Proceedings Volume 5963, 59630N (2005) https://doi.org/10.1117/12.625100

KEYWORDS: Vacuum ultraviolet, Calcium, Silicon films, Atomic force microscopy, Refractive index, Lanthanides, Thin films, Lanthanum, Silicon, Gadolinium

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Proceedings Article | 5 October 2005 Paper

Optical, structural, and mechanical properties of gadolinium tri-fluoride thin films grown on amorphous substrates

Roland Thielsch, Joerg Heber, Hein Uhlig, Norbert Kaiser

Proceedings Volume 5963, 59630O (2005) https://doi.org/10.1117/12.625096

KEYWORDS: Refractive index, Crystals, Thin films, Silica, Vacuum ultraviolet, Excimer lasers, Optical properties, Deep ultraviolet, Diffraction, Reflectivity

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Proceedings Article | 25 February 2004 Paper

Optical and structural inhomogeneity in reactive evaporated and IAD CeO2 films analyzed by x-ray diffraction and reverse optical engineering

Roland Thielsch

Proceedings Volume 5250, (2004) https://doi.org/10.1117/12.512958

KEYWORDS: Refractive index, Ions, Crystals, Water, Data modeling, X-ray diffraction, Thin films, Diffraction, Interfaces, Ion beams

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Proceedings Article | 25 February 2004 Paper

Development of mechanical stress in fluoride multilayers for UV applications

Roland Thielsch, Joerg Heber, Hein Uhlig, Norbert Kaiser

Proceedings Volume 5250, (2004) https://doi.org/10.1117/12.512952

KEYWORDS: Silicon films, Diffraction, Multilayers, Ultraviolet radiation, Silica, Thin films, Temperature metrology, Silicon, Crystals, Coating

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Proceedings Article | 30 May 2003 Paper

Luminescence of UV thin films

Joerg Heber, Christian Muehlig, Wolfgang Triebel, Norbert Danz, Roland Thielsch, Norbert Kaiser

Proceedings Volume 4932, (2003) https://doi.org/10.1117/12.472391

KEYWORDS: Silica, Color centers, Laser induced fluorescence, Mirrors, Multilayers, Ultraviolet radiation, Aluminum, Coating, Thin films, Luminescence

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Proceedings Article | 25 February 2002 Paper

Laser ablation patterning of dielectric layer stacks for 193-nm mask fabricaton

Juergen Ihlemann, Katharina Rubahn, Roland Thielsch

Proceedings Volume 4426, (2002) https://doi.org/10.1117/12.456875

KEYWORDS: Laser ablation, Dielectrics, Photomasks, Reflectivity, Optical lithography, Laser damage threshold, Silica, Absorption, Scanning electron microscopy, Oxygen

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Proceedings Article | 12 April 2001 Paper

Achromatic damage investigations on mirrors for UV-free electron lasers

Alexandre Gatto, Norbert Kaiser, Roland Thielsch, David Garzella, M. Hirsch, Daniele Nutarelli, G. de Ninno, Eric Renault, Marie-Emmanuelle Couprie, Philippe Torchio, Marco Alvisi, Gerard Albrand, Claude Amra, Marino Marsi, Mauro Trovo, R. Walker, M. Grewe, Jean Roger, Albert Boccara

Proceedings Volume 4347, (2001) https://doi.org/10.1117/12.425044

KEYWORDS: Optical coatings, Ultraviolet radiation, Atomic force microscopy, Optical resonators, Crystals, Synchrotron radiation, Electrons, Reflectivity, Free electron lasers, Mirrors

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Proceedings Article | 25 October 2000 Paper

Comparative study of the UV-optical and structural properties of SiO2, Al2O3, and HfO2 single layers deposited by reactive evaporation, ion-assisted deposition, and plasma-ion-assisted deposition

Roland Thielsch, Alexandre Gatto, Joerg Heber, Sven Martin, Norbert Kaiser

Proceedings Volume 4102, (2000) https://doi.org/10.1117/12.405294

KEYWORDS: Ions, Refractive index, Optical coatings, Oxygen, Absorption, Ultraviolet radiation, Thin films, Plasma, Water, Thin film coatings

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Proceedings Article | 25 October 2000 Paper

Toward resistant UV mirrors at 200 nm for free electron lasers: manufacture, characterizations, and degradation tests

Alexandre Gatto, Roland Thielsch, Norbert Kaiser, M. Hirsch, David Garzella, Daniele Nutarelli, G. de Ninno, Eric Renault, Marie-Emmanuelle Couprie, Philippe Torchio, Marco Alvisi, Gerard Albrand, Claude Amra, Marino Marsi, Mauro Trovo, R. Walker, M. Grewe, Stephanie Robert, Jean Roger, Albert Boccara

Proceedings Volume 4102, (2000) https://doi.org/10.1117/12.405293

KEYWORDS: Mirrors, Free electron lasers, Ultraviolet radiation, Reflectivity, Synchrotron radiation, Coating, Absorption, Ions, Manufacturing, Photons

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Proceedings Article | 21 July 2000 Paper

Magnetron sputtered EUV mirrors with high-thermal stability

Torsten Feigl, Sergey Yulin, Norbert Kaiser, Roland Thielsch

Proceedings Volume 3997, (2000) https://doi.org/10.1117/12.390079

KEYWORDS: Reflectivity, Multilayers, Molybdenum, Silicon, Near infrared, Interfaces, Mirrors, Extreme ultraviolet, Annealing, X-rays

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Proceedings Article | 3 March 2000 Paper

Properties of fluoride DUV excimer laser optics: influence of the number of dielectric layers

Winfried Arens, Detlev Ristau, Jens Ullmann, Christoph Zaczek, Roland Thielsch, Norbert Kaiser, Angela Duparre, Oliver Apel, Klaus Mann, Hans Lauth, Helmut Bernitzki, Johanes Ebert, Stefan Schippel, H. Heyer

Proceedings Volume 3902, (2000) https://doi.org/10.1117/12.379314

KEYWORDS: Absorption, Scattering, Deep ultraviolet, Optical components, Optical coatings, Laser damage threshold, Laser optics, Reflection, Thin film coatings, Reflectivity

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Proceedings Article | 3 March 2000 Paper

Coated optics for DUV excimer laser application

Jens Ullmann, Michael Mertin, Hans Lauth, Helmut Bernitzki, Klaus Mann, Detlev Ristau, Winfried Arens, Roland Thielsch, Norbert Kaiser

Proceedings Volume 3902, (2000) https://doi.org/10.1117/12.379348

KEYWORDS: Resistance, Antireflective coatings, Laser damage threshold, Laser scattering, Silica, Deep ultraviolet, Scattering, Thin films, Absorption, Coating

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Proceedings Article | 3 March 2000 Paper

Critical issues on the assessment of laser-induced damage thresholds of fluoride multilayer coatings at 193 nm

Roland Thielsch, Joerg Heber, Norbert Kaiser, Sven Martin, Eberhard Welsch

Proceedings Volume 3902, (2000) https://doi.org/10.1117/12.379309

KEYWORDS: Multilayers, Optical coatings, Laser induced damage, Laser damage threshold, Absorption, Infrared radiation, Water, Laser applications, Ultraviolet radiation, Magnesium fluoride

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Proceedings Article | 3 March 2000 Paper

Comparison of the optical properties and UV radiation resistance of HfO2 single layers deposited by reactive evaporation, IAD, and PIAD

Roland Thielsch, Torsten Feigl, Norbert Kaiser, Sven Martin, Salvatore Scaglione, Francesca Sarto, Marco Alvisi, Antonella Rizzo

Proceedings Volume 3902, (2000) https://doi.org/10.1117/12.379310

KEYWORDS: Optical coatings, Refractive index, Ions, Thin films, Thin film coatings, Optical properties, Absorption, Ultraviolet radiation, Crystals, Resistance

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Proceedings Article | 3 March 2000 Paper

Pulsed top-hat beam thermal lens: a simple and sensitive tool for in-situ measurement on ultraviolet dielectric components

Bincheng Li, Sven Martin, Eberhard Welsch, Roland Thielsch, Joerg Heber, Norbert Kaiser

Proceedings Volume 3902, (2000) https://doi.org/10.1117/12.379313

KEYWORDS: Dielectrics, Absorption, Optical coatings, Ultraviolet radiation, Excimer lasers, Laser induced damage, Laser beam diagnostics, Copper, Laser irradiation, In situ metrology

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Proceedings Article | 3 March 2000 Paper

Nonlinear absorption phenomena in oxide coatings for 193 nm

Oliver Apel, Klaus Mann, Joerg Heber, Roland Thielsch

Proceedings Volume 3902, (2000) https://doi.org/10.1117/12.379311

KEYWORDS: Absorption, Nonlinear optics, Oxides, Optical coatings, Singular optics, Silica, Dielectrics, Interfaces, Aluminum, Thin films

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Proceedings Article | 7 September 1999 Paper

Structural and mechanical properties of evaporated pure and mixed MgF2-BaF2 thin films

Roland Thielsch, Matthieu Pommies, Joerg Heber, Norbert Kaiser, Jens Ullmann

Proceedings Volume 3738, (1999) https://doi.org/10.1117/12.360125

KEYWORDS: Magnesium fluoride, Refractive index, Thin films, Temperature metrology, X-rays, Crystals, X-ray diffraction, Thin film coatings, Water, Optical coatings

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Proceedings Article | 7 September 1999 Paper

Microstructure and radiation interactions of optical interference coatings for 193-nm applications

Joerg Heber, Roland Thielsch, Holger Blaschke, Norbert Kaiser, Uwe Leinhos, A. Goertler

Proceedings Volume 3738, (1999) https://doi.org/10.1117/12.360076

KEYWORDS: Optical coatings, Absorption, Thin film coatings, Atmospheric optics, Deep ultraviolet, Contamination, Thin films, Multilayers, Water, Laser induced damage

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Proceedings Article | 7 September 1999 Paper

Mechanical stress in fluoride coatings

Jens Ullmann, Hans-Georg Keck, Roland Thielsch, Hein Uhlig, Norbert Kaiser

Proceedings Volume 3738, (1999) https://doi.org/10.1117/12.360074

KEYWORDS: Systems modeling, Magnesium fluoride, Silica, Temperature metrology, Silicon, Thin films, Silicon films, Optical coatings, Multilayers, Reflectivity

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