Mr. Russell A. Shoemake Profile

Russell A. Shoemake

Sr. Engineering Manager at Micron Technology Inc

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Publications (1)

Proceedings Article | 11 March 2002 Paper

Partitioning of photomask processes for defects

Charles Howard, Russell Shoemake, Phillip Lim, Curt Linder

Proceedings Volume 4562, (2002) https://doi.org/10.1117/12.458318

KEYWORDS: Inspection, Etching, Thulium, Photomasks, Scanning electron microscopy, Calibration, Reflectivity, Defect inspection, Manufacturing, Dry etching

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