Sanghak Kim
at Lam Research Corp.
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 10 April 2024 Presentation
Proceedings Volume 12958, 1295803 (2024) https://doi.org/10.1117/12.3009115
KEYWORDS: Metals, Resistance, Optical lithography, Ions, Transmission electron microscopy, Plasma, Oxygen, Oxides, Oxidation, Nanostructures

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